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Transparent materials for planar microelectrode arrays
Jarušek, Jaromír ; Brodský, Jan ; Gablech, Imrich
This paper is focused on indium tin oxide (ITO), ultrathin gold, titanium nitride (TiN) and diamond-like carbon (DLC) thin films that can be used for transparent or semitransparent electrodes and interconnects for planar microelectrode arrays. Paper further describes methods of thin film deposition of selected materials, microfabrication of planar microelectrode arrays, their preparation for electrochemical measurement and results of electrochemical impedance spectroscopy and cyclic voltammetry.
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Measuring probe tips in engineering metrology
Böhm, Jakub ; Harčarík, Matej (referee) ; Jankových, Róbert (advisor)
This diploma thesis deals with measuring touches problems in industrial metrology. Thesis describes adhesive wear and tear which is caused by measuring probes when dynamical measuring is being concluded. Measuring of damaged component made of silumin and its different changes of texture by different measuring probes are evaluated. Measuring touches are made of titanium nitride, silicon nitride, zirconium, bearing chrome steel, ruby, experimental composite material and nanocrystalline diamond.
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Sputtering of nitride layers using Kaufman ion-beam source for bioelectronics applications
Jarušek, Jaromír ; Chmela, Ondřej (referee) ; Gablech, Imrich (advisor)
In this work, nitride layers, their applications in bioelectronics, and methods of chemical vapour deposition and physical vapour deposition are presented. The focus of this work is the preparation of titanium nitride thin films by reactive sputtering using Kaufman ion-beam sources. Thin films were deposited on silicon wafers and microslides. Deposited titanium nitride thin films are characterized by X-ray diffraction, four-point probe sheet resistance measurement and profilometry to determine residual stress.
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Cermets and theirs effective use
Vaněček, Stanislav ; Sedlák, Josef (referee) ; Humár, Anton (advisor)
The Thesis described within the scope of the Master Program is focused on cermets, which belong among cutting materials. The introductory portion of the Thesis presents the characteristics of cermets from the perspective of production, physical-mechanical characteristics, marking and usage in cutting. The core portion of the Thesis focuses on the role of cermets in the category of leading world producers of tools and instrumental materials, cutting evaluation, and the suggested working conditions of cermets in lathing operations. The working conditions are prepared for steel and cast iron. The conclusion of the Thesis focuses on a technical-economical analysis of cermets.
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Sputtering of nitride layers using Kaufman ion-beam source for bioelectronics applications
Jarušek, Jaromír ; Chmela, Ondřej (referee) ; Gablech, Imrich (advisor)
In this work, nitride layers, their applications in bioelectronics, and methods of chemical vapour deposition and physical vapour deposition are presented. The focus of this work is the preparation of titanium nitride thin films by reactive sputtering using Kaufman ion-beam sources. Thin films were deposited on silicon wafers and microslides. Deposited titanium nitride thin films are characterized by X-ray diffraction, four-point probe sheet resistance measurement and profilometry to determine residual stress.
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Measuring probe tips in engineering metrology
Böhm, Jakub ; Harčarík, Matej (referee) ; Jankových, Róbert (advisor)
This diploma thesis deals with measuring touches problems in industrial metrology. Thesis describes adhesive wear and tear which is caused by measuring probes when dynamical measuring is being concluded. Measuring of damaged component made of silumin and its different changes of texture by different measuring probes are evaluated. Measuring touches are made of titanium nitride, silicon nitride, zirconium, bearing chrome steel, ruby, experimental composite material and nanocrystalline diamond.
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Material design problems of plasma-chemical reactors for disposal perfluorinated compounds
Brožek, Vlastimil ; Březina, Václav ; Mastný, L. ; Kubatík, Tomáš František ; Živný, Oldřich
Reduction of perfluorinated gases emissions from semiconductor industry has recently introduced a serious problem from both technological and economic side. With respect to chemistry of the decomposition reactions the most effective abatement techniques developed up to now consists in the interaction of those gaseous pollutants with several types of plasmas. In the framework of Czech-Taiwanese bilateral project No. 17-10246J 'Decomposition of Perfluorinated Compounds and Fluorinated Ozone Depleting Substances' a new plasmochemical reactor design is to be solved. In this reactor the plasma abatement process consisting of interaction of the plasma generated by unique watter stabilized H-WSP plasma torch at temperatures ranging\nfrom 2000 K up to 25,000 K with the treated gases will be carried out. However, the main product generated in the reactor during the steam plasma abatement process is hydrogen fluoride which causes corrosion of almost every construction material. The aim pursued by the work presented is to search for the materials resistant to exposition of HF even at high temperatures. To investigate corrosion resistance of construction materials with thermal stability within temperature interval 2700-3000 °C titan nitride, boron nitride, and silicon carbide have been selected. The samples of those materials have been prepared by spark plasma sintering method and exposed to concentrated solution of hydrofluoric acid for which corrosion rates have been measured
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Cermets and theirs effective use
Vaněček, Stanislav ; Sedlák, Josef (referee) ; Humár, Anton (advisor)
The Thesis described within the scope of the Master Program is focused on cermets, which belong among cutting materials. The introductory portion of the Thesis presents the characteristics of cermets from the perspective of production, physical-mechanical characteristics, marking and usage in cutting. The core portion of the Thesis focuses on the role of cermets in the category of leading world producers of tools and instrumental materials, cutting evaluation, and the suggested working conditions of cermets in lathing operations. The working conditions are prepared for steel and cast iron. The conclusion of the Thesis focuses on a technical-economical analysis of cermets.
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