Original title: Transparent materials for planar microelectrode arrays
Authors: Jarušek, Jaromír ; Brodský, Jan ; Gablech, Imrich
Document type: Papers
Language: eng
Publisher: Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologií
Abstract: This paper is focused on indium tin oxide (ITO), ultrathin gold, titanium nitride (TiN) and diamond-like carbon (DLC) thin films that can be used for transparent or semitransparent electrodes and interconnects for planar microelectrode arrays. Paper further describes methods of thin film deposition of selected materials, microfabrication of planar microelectrode arrays, their preparation for electrochemical measurement and results of electrochemical impedance spectroscopy and cyclic voltammetry.
Keywords: diamond like carbon; DLC; electrochemical impedance spectroscopy; planar microelectrode array (pMEA) indium tin oxide (ITO); titanium nitride; ultrathin gold thin film
Host item entry: Proceedings II of the 30st Conference STUDENT EEICT 2024: Selected papers, ISBN 978-80-214-6230-4, ISSN 2788-1334

Institution: Brno University of Technology (web)
Document availability information: Fulltext is available in the Brno University of Technology Digital Library.
Original record: https://hdl.handle.net/11012/249295

Permalink: http://www.nusl.cz/ntk/nusl-622586


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