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Main Activites of the Institute of Scientific Instruments
Müllerová, Ilona ; Radlička, Tomáš ; Mika, Filip ; Krzyžánek, Vladislav ; Neděla, Vilém ; Sobota, Jaroslav ; Zobač, Martin ; Kolařík, Vladimír ; Starčuk jr., Zenon ; Srnka, Aleš ; Jurák, Pavel ; Zemánek, Pavel ; Číp, Ondřej ; Lazar, Josef ; Mrňa, Libor
Institute of Scientific Instruments (ISI) was established in 1957 to develop diverse instrumental equipment for other institutes of the Academy of Sciences. ISI has long experience in research and development of electron microscopes, nuclear magnetic resonance equipment, coherent optics and related techniques. Nowadays the effort concentrates on scientific research in the field of methodology of physical properties of matter, in particular in the field of electron optics, electron microscopy and spectroscopy, microscopy for biomedicine, environmental electron microscopy, thin layers, electron and laser beam welding, electron beam lithography using Gaussian and shaped electron beam, nuclear magnetic resonance and spectroscopy, cryogenics and superconductivity, measurement and processing of biosignals in medicine, non-invasive cardiology, applications of focused laser beam (optical tweezers, long-range optical delivery of micro- and nano-objects) and lasers for measurement and metrology. ISI works both independently and in cooperation with universities, other research and professional institutions and with private companies at national and international level.
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Dynamic impact tester of hard thin coatings
Grossman, Jan ; Dupák, Libor ; Fořt, Tomáš ; Sobota, Jaroslav
An impact test has been used to evaluate the impact wear resistance of nanostructured hard coatings using a system developed at the Institute of Scientific Instruments in collaboration with the Brno University of Technology. After the test, wear scars were evaluated by means of scanning electron microscope, spectral analyses and profilometer. The impact test offers an important new method for the determination of both the fracture toughness and wear behaviour of hard thin coatings.
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Influence of annealing to stress in CNx:(H) films observed by SLEEM
Mikmeková, Eliška ; Mikmeková, Šárka ; Müllerová, Ilona ; Sobota, Jaroslav
The effect of high residual stress on the quality of thin sputtered carbon nitride films has been studied by Scanning Low Energy Electron Microscopy (SLEEM). Basically, two different types of stress can be identified in thin films: compressive stress and tensile stress. Compressive stress leads to wrinkling and film delamination and tensile stress can cause the fracturing of thin films. Experiments were made in the Tescan TS 5130 MM equipped with the Cathode Lens system (CL), which enable us to observe samples at arbitrary landing energies of the illuminating electrons. Operating of a SEM at low energies offers several advantages: an increase of materials contrast via low energy, high ratio SE, BSE signal and noise, smaller interaction volume and elimination of charging effects. The effect of annealing in vacuum to residual stress (calculated from Stoney’s equation) was measured. The porous character of films was observed by thermal desorption spectroscopy (TDS).
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Institute of Scientific Instruments: An Overview Presenatation
Kolařík, Vladimír ; Zobač, Martin ; Fořt, Tomáš ; Vlček, Ivan ; Dupák, Libor ; Mikmeková, Šárka ; Mikmeková, Eliška ; Mrňa, Libor ; Horáček, Miroslav ; Sobota, Jaroslav
The aim of this contribution is to present the Institute of Scientific Instrument of the Academy of Sciences of the Czech Republic, mainly from the potential of applied research viewpoint. It covers mainly the six application fields including material study of metals and alloys, nano layer residual stress observation methods, 2 kW fibre laser, impact testing of hard coatings, e-beam welding, machining and engraving, and finally e-beam lithography. Recently achieved results as well as the new application potential are presented. Furthermore, each topic is assumed to have a separate presentation prepared in more details within this event. A brief overview follows. Scanning low energy electron microscopy (SLEEM) is increasingly becoming recognized as a valuable analytical tool in the field of materials science. The SLEEM is also used for observation of compressive stress in nano layers that leads to wrinkling and film delamination. Using the fibre laser, we can offer 3D laser welding and cutting of various type of materials and laser surface hardening too. For the hard coatings testing and evaluation of their impact resistance a new method was suggested (Dynamic Impact Wear Test). During testing the specimen is cyclically loaded by tungsten carbide ball that impacts of the coating/substrate surface. In house e-beam welding machine allows for welding, machining, engraving and other utilizations of intense electron beam. The group of micro lithography is able to prepare micro and nano structures in thin layers of metals and other materials; including the characterization of the realized structures
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Observation of high stressed hydrogenated carbon nitride films by SLEEM
Mikmeková, Eliška ; Müllerová, Ilona ; Sobota, Jaroslav
Two main factors can lead to losing adhesion in thin sputtered carbon nitride films: high residual stress and absorption of humidity. Basically, two different types of stress can be identified in thin films: compressive stress and tensile stress. Compressive stress can lead to wrinkling and film delamination, and tensile stress can cause the fracturing of thin films. For reactive sputtering of hydrogenated carbon nitride films, the compressive stress is typical. The films were prepared from graphite target (high purity, 99.9999 %) in mixture of nitrogen and hydrogen discharge.
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Studium mechanických vlastností DLC tenkých vrstev deponovaných v jedno a dvoufrekvenčním kapacitním výboji
Buršíková, V. ; Stoica, A. ; Sobota, Jaroslav ; Grossman, Jan ; Fořt, Tomáš ; Klapetek, P. ; Buršík, Jiří ; Bláhová, O.
Nanostrukturované DLC povlaky byly deponovány na několik různých podložek (křemík, sklo, polykarbonát a ocel) v jedno(13.56 MHz) a dvoufrekvenčním kapacitním vysokofrekvenčním výboji(LF=100-300kHz, HF =13.56 MHz). Cílem bylo nalézt optimální kombinaci vysoko a nízko frekvenční (kontinualní nebo pulzní)excitace, umožňující jak pokrytí různých podložek tak významně snížit vnitřní napětí v povlacích.
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Studium mechanických vlastností gradovaných amorfních DLC povlaků deponovaných PECVD
Buršíková, V. ; Stoica, A. ; Sobota, Jaroslav ; Grossman, Jan ; Fořt, Tomáš ; Klapetek, P. ; Buršík, Jiří ; Peřina, Vratislav ; Bláhová, O.
K optimalizaci vlastností vrstev je třeba optimalizovat elastický modul, tvrdost, povrchovou pevnost, lomovou houževnatost vrstvy a její adhezi k podložce. Bylo navrženo chránit povrch podložky gradovanou vrstvou jež monotónně mění elastický modul a Poissonův poměr.
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