|
|
Advanced techniques of micromachining
Šalomoun, Vojtěch ; Prášek, Jan (referee) ; Pekárek, Jan (advisor)
Fabrication of micro-electro-mechanical systems (MEMS) requires advanced level of miniaturization, which is not achievable by technology used in microeletronics. Socalled micromachining covers many unique techniques of material processing to get microstructures with possible dimensions below 1 m. This bachelor’s thesis gives a general introduce to micromachining of MEMS. Its focus is on bulk and surface micromachining by wet and dry etching. The practical part contains design of microstructures, their manufacturing process and creation of computer models in CoventorWare suite.
|
|
|
Motion detection based on an accelerometer measurement
Štancl, František ; Šimek, Milan (referee) ; Pál, Tamás (advisor)
This thesis is devoted to detect motion and it is focused on energy consumption. The introduction involves possible ways for acceleration measuring and discusses The MEMS technology in accelerometers. It also describes components used in a low-power module and some suggestions leading to resolution of this issue. This thesis includes the module design as well, PCB design and software equipment. Finally, it evaluates the results and the solution accuracy.
|
|
|
Development localization board
Szabó, Michal ; Novotný, Radovan (referee) ; Levek, Vladimír (advisor)
This document describes a device capable to determine geographical position thanks to its GNSS module and measure the change of movement with the help of an accelerometer and gyroscope. Outputs of these integrated circuits are combined, data are processed and fused thanks to a numerical integration and mathematical filters. Results are stored on a memory card. The whole development is described from a concept, through the making of the device and software algorithms to the testing of its functions.
|
|
|
Characterization of graphene electrical properties on MEMS structures
Brodský, Jan ; Pekárek, Jan (referee) ; Gablech, Imrich (advisor)
This work presents basic properties of graphene, methods for its synthesis and methods for its characterization by Raman spectroscopy, two-point probe, four-point probe and van der Pauw measurements. The experimental part of this work describes the process of graphene oxide, reduced graphene oxide and graphene sample preparation and measurement of its current-voltage characteristic by two-point probe method. Subsequently, sample annealing in vacuum furnace is described in this work. The annealing is important for acquiring good electrical contact between the 2D material and electrodes. Sample analysis by Raman spectroscopy is performed. The last chapters of this work describe design and fabrication of MEMS structure. Such structure serves for characterization of graphene and other 2D materials.
|
|
|
9DOF sensor for weapon orientation measurement
Růžička, Jiří ; Richter, Miloslav (referee) ; Šedivá, Soňa (advisor)
This thesis deals with multi-axis position sensors, their nature and individual parts and types of these sensors. It is outlined their historical origin and the most used modern types, such as micro-electro-mechanical sensors. Further, the properties of these sensors, error sources and their compensation are discussed. Output data formats are also discussed here, such as Euler angles, their calculation and applications. The selected sensor is implemented in the simulator electronics, and the graphical application demonstrates its functions.
|
|
|
Analysis and construction of an optical fibre tunable attenuator for telecommunication applications
Prokop, Daniel ; Eliáš, Josef (referee) ; Urban, František (advisor)
This paper deals with the possibilities of designing the module for control of the attenuation of the optical signal. The paper describes basics of ber optic transmission and beam e ects. Variants of attenuation cells are characterized in this paper and based on the ndings a solution of the module for control of the attenuation of the optical signal is proposed. Practical section of the thesis deals with the design and physical construction of module for control of the attenuation of the optical signal using MEMS variable optical attenuator.
|
|
|
Application of MEMS technology in the field of thermoelectric generators
Janák, Luděk ; Brázdil, Marian (referee) ; Ančík, Zdeněk (advisor)
Práce je zaměřena na moderní oblast využití MEMS technologií v oblasti termoelektrických generátorů. Úvodem jsou diskutovány základní principy konstrukce a výroby MEMS TEG modulů. Praktická část práce sestává z ověření parametrů komerčního MEMS TEG modulu měřením a jeho simulace. Simulace je provedena pomocí MATLAB/Simulink i analytických metod. V závěru práce je na základě získaných poznatků provedeno zhodnocení využití metod „thermal energy harvesting” v oblasti letecké techniky.
|
|
|
The Rover from MERKUR Kit Controlled by Apple iPhone
Novák, Pavel ; Šolony, Marek (referee) ; Ševcovic, Jiří (advisor)
The destination of bachelor's thesis is assamble rover from Merkur controlled by Apple iPhone. Rover control is realized through PC, which income iPhone's signals. Control is provided by MEMS accelerometer, which is iPhone's component. Control application was built in language C++ and application for iPhone was built in language Objective-C.
|
|
|
An Extended Model of a MEMS Gyroscope: Design and Identification
Vágner, Martin ; Sopata,, Milan (referee) ; Tůma, Jiří (referee) ; Beneš, Petr (advisor)
The thesis is aimed on measurement and modeling of MEMS gyroscopes based on input-output characteristics. The first part briefs the state of the art. The second part is dedicated to measurement methodology. Critical points and sources of uncertainty are discussed and evaluated using measurements or simulations. The last part shows key characteristics of MEMS gyroscopes based on the survey of a group of different sensor types. The results have revealed significant influence of supply voltage that causes bias drift of the gyroscope and bias drift of the internal temperature sensor. The error can be comparable to temperature drift; however, this effect is not addressed in the literature. The second observed effect is temperature dependency of angle random walk. In the last part, a general model of a MEMS gyroscope is rewritten to reflect observed effects. Moreover, the structure is selected to be easily extendable and the coefficients are expressed to allow a comparison of nominal parameters of different sensors.
|
|
|
Testing of MEMS gyroscopes
Hasík, Stanislav ; Vágner,, Martin (referee) ; Klusáček, Stanislav (advisor)
This diploma thesis presents theoretical information regarding MEMS gyroscopes their parameters and designs. The description of measurement chain be used for testing of MEMS gyroscopes in Honeywell International s.r.o. is presented. Special focus is devoted to: the Polytec MSA-500 system, the Standa goniometers and their controller, Peltier cell and its driver. The practical part of this thesis contains the description of the thermal control system and also the description of the developed “Measurement system” in the LabVIEW software which is used for controlling the goniometers position and the Peltier cell. The system is able to fully control two goniometer stages, align the surface of tested MEMS device to orthogonal position with respect to the Polytec MSA-500 measurement head and also control the temperature of the tested device. The last part of this thesis presents the tests of the MEMS gyroscope parameters with special focus to the MEMS gyroscope angle random walk and the bias dependence on the vacuum quality of the structure environment.
|
guest ::
