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Scintillation SE Detector with Controlled Gas Flow for VP SEM
Kozák, Josef ; Neděla, Vilém (referee) ; Jirák, Josef (advisor)
This master’s thesis deals with a design and optimization of an experimental scintillation secondary electron detector for the environmental scanning electron microscope and with a description of a detector operation principle. The experiment is founded on simulations of a gas flow in detector inner sections and on simulations of secondary electron trajectories in electrostatic fields of the detector. On the basis of the simulations, new solutions of the detector designs are proposed. For these designs, same simulations as previous are performed and designs that seem to be feasible for the secondary electron detection in environmental scanning electron microscope are selected.
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Scintillation SE Detector for VP SEM
Kozelský, Adam ; Čudek, Pavel (referee) ; Jirák, Josef (advisor)
This work contains description of basic properties and principles of electron microscopy focused on scanning electron microscopy. It describes construction solutions of a microscope, interaction between electron beam and sample, generation of backscattered and secondary electrons. Next chapters are dealing with development of electron microscopy and environmental scanning electron microscopy. The experimental part of this thesis is focuses on the detection of secondary electrons with scintillation detector in environmental scanning electron microscope at higher pressure in the specimen chamber. Concretely is focused on optimization of collecting grid voltage and measurement of pressure dependences.
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Voltage contrast method in ESEM
Krňávek, Martin ; Čudek, Pavel (referee) ; Jirák, Josef (advisor)
This work contains theoretical description of basic features and principles of electron microscopy, with focus on environmental scanning electron microscopy. It describes function of the microscope, interactions that takes place after collision of electron pack with a sample, mainly it describes creation of back reflected electrons and secondary electrons and methods of voltage contrast. The practical part focus on voltage contrast issue by observing decomposition of electric potentials on surface of semiconductor devices and it establishes ideal working conditions for observing voltage contrast by scintillation detector of secondary electrons.
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Ionization Detector for Variable Pressure SEM
Černoch, David ; Špinka, Jiří (referee) ; Jirák, Josef (advisor)
This graduation theises deal with influence of an additional grating possitioned berween the sample and the ionisation detektor of the environmental scannin elektron microscope on signal detection. Signal level is measured for changing pressure, at different voltages on the aditional grating, at different sample - additional electrode distance and at different sample - detektor distance. Influence of the additional grating is simulated for real working conditions on PC.
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Method for evaluation of signal level value in environmental SEM
Kršňák, Jiří ; Tihlaříková, Eva (referee) ; Čudek, Pavel (advisor)
This work deals with the evaluating of the signal level value from the sample in the environmental SEM. In work there were processed the comparison of the osciloscopic method for the evaluating of the signal level value in the environmental SEM, the method for the evaluating of the signal level from the grey level of the sample images and the method for the evaluating of the signal level from the osciloscop. There are described the advantages and disadvantages of the methods and procedures for processing the methods.
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Voltage contrast method in ESEM
Krňávek, Martin ; Čudek, Pavel (referee) ; Jirák, Josef (advisor)
This work contains theoretical description of basic features and principles of electron microscopy, with focus on environmental scanning electron microscopy. It describes function of the microscope, interactions that takes place after collision of electron pack with a sample, mainly it describes creation of back reflected electrons and secondary electrons and methods of voltage contrast. The practical part focus on voltage contrast issue by observing decomposition of electric potentials on surface of semiconductor devices and it establishes ideal working conditions for observing voltage contrast by scintillation detector of secondary electrons.
|
|
|
Voltage contrast method in ESEM
Krňávek, Martin ; Čudek, Pavel (referee) ; Jirák, Josef (advisor)
This work contains theoretical description of basic features and principles of electron microscopy, with focus on environmental scanning electron microscopy. It describes function of the microscope, interactions that takes place after collision of electron pack with a sample, mainly it describes creation of back reflected electrons and secondary electrons and methods of voltage contrast. The practical part focus on voltage contrast issue by observing decomposition of electric potentials on surface of semiconductor devices and it establishes ideal working conditions for observing voltage contrast by scintillation detector of secondary electrons.
|
|
|
Scintillation SE Detector for VP SEM
Kozelský, Adam ; Čudek, Pavel (referee) ; Jirák, Josef (advisor)
This work contains description of basic properties and principles of electron microscopy focused on scanning electron microscopy. It describes construction solutions of a microscope, interaction between electron beam and sample, generation of backscattered and secondary electrons. Next chapters are dealing with development of electron microscopy and environmental scanning electron microscopy. The experimental part of this thesis is focuses on the detection of secondary electrons with scintillation detector in environmental scanning electron microscope at higher pressure in the specimen chamber. Concretely is focused on optimization of collecting grid voltage and measurement of pressure dependences.
|
|
|
Scintillation SE Detector with Controlled Gas Flow for VP SEM
Kozák, Josef ; Neděla, Vilém (referee) ; Jirák, Josef (advisor)
This master’s thesis deals with a design and optimization of an experimental scintillation secondary electron detector for the environmental scanning electron microscope and with a description of a detector operation principle. The experiment is founded on simulations of a gas flow in detector inner sections and on simulations of secondary electron trajectories in electrostatic fields of the detector. On the basis of the simulations, new solutions of the detector designs are proposed. For these designs, same simulations as previous are performed and designs that seem to be feasible for the secondary electron detection in environmental scanning electron microscope are selected.
|
|
|
Ionization Detector for Variable Pressure SEM
Černoch, David ; Špinka, Jiří (referee) ; Jirák, Josef (advisor)
This graduation theises deal with influence of an additional grating possitioned berween the sample and the ionisation detektor of the environmental scannin elektron microscope on signal detection. Signal level is measured for changing pressure, at different voltages on the aditional grating, at different sample - additional electrode distance and at different sample - detektor distance. Influence of the additional grating is simulated for real working conditions on PC.
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