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Simulation of optical system of deposition controller
Doleček, Roman ; Pintr, Pavel ; Václavík, Jan
The report describes results of modeling of optical system which is component of optical monitoring system applied on machines for vacuum thin film deposition. Results were compared to real behavior of system, especially chromatic properties and total throughput. A numerical optimization, based on analysis results, was performed in order to improve throughput and ruggedness of the system.
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Deposition of the thin films for applications of advanced oxidation processes using metal dopants
KRAJČOVIČ, Jan
The aim of this diploma thesis is deposition of TiO2 thin films onto different types and sizes of substrates, and some of these layers dope by iron or silver. During the work was range of TiO2 layers created using a method of physical vapor deposition namely magnetron sputtering. For these processes was chosen the Dreva ARC 400 Hard Material Coating Plant device. The main aim of these depositions was to attempt to create TiO2 thin films on a substrates of larger surface than its in average laboratory processes usual. For this purpose were TiO2 layers deposited onto square glass plates of side length 10 cm. For comparsion and analysis were also as a substrates used microscope slides and fragments of silicon wafers. These substrates were used for testing of photocatalytic activity and on surface morphology (SEM). The theoretical part of this thesis aims to a methods of deposition TiO2 layers and their characteristics. In the experimental part is the used coating equipment and parameters of each deposition process described. Further the characteristics and results of individual experiments are described.
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Annealing of thin film polycrystalline silicon solar cells in water vapour
Pikna, Peter ; Fejfar, Antonín
Samples of thin film polycrystalline silicon solar cells prepared by the Company CSG Solar AG were treated in water vapour. Appearance of treated solar cells was very similar to samples etched in a solution of acids, which is commonly used to approach the bottom part of pn junction. No significant improvement of measured open-circuit voltage Voc was observed, but the etching effect of water vapour can determine the upper limit of temperature, pressure and treatment time for water vapour passivation. Novel approach for preparation of a depth profile to approach the bottom part of pn junction is proposed.
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Diamond chemical vapor deposition
Kromka, Alexander
Present paper reviews growth of diamond thin films by various chemical vapor deposition processes. Basic characteristics and common features of processes are pointed out with a respect to quality of grown films and standard process parameters. Novel and non-standard diamond syntheses techniques are briefly discussed.
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Determination of mechanical properties of thin films by nanocompresion
Kuběna, Ivo ; Hutař, Pavel ; Náhlík, Luboš ; Kruml, Tomáš
Measurements of mechanical properties of objects with micrometric (or even smaller) dimensions is still not a common task. In this paper, the possibility of evaluation basic mechanical properties of a thin film by nanocompression is demonstrated. Cylindrical specimens with the axis normal to the film plane, attached by the bottom to the substrate, are prepared by the focused ion beam technique. Such pillars are deformed by a nanoindenter outfitted by a flat diamond punch. An equivalent of compression curve is obtained. It is possible to measure directly parameters as the yield stress, stress at a chosen strain level or work hardening rate. Finite elements modelling is necessary for the Young modulus evaluation. It is shown that the Young modulus can be evaluated quite precisely, even if the geometry of the pillar is not perfect.
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Optimization of preparation of microcompresion specimens from thin films films using focused ion beam
Kuběna, Ivo ; Kruml, Tomáš
In this paper new method of mechanical properties measurement of thin films is presented. This method combines preparation of specimen using focused ion beam and compressive test by nanoindenter. This paper is focused on description of the preparation microcompressive specimens. The thin film Al – 1.5 wt. % Cu was studied. The cylindrical pillars had diameter about 1.3 micrometers and their height was determined by thickness of layer (2 micrometers). The optimized reproducible process of the preparation of the microcompressive specimens was found. This process is optimized from geometry and preparation time point of view. Successfully executed compressive tests confirmed suitability specimens for microcompressive test
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Kritický stav v tenkém Nb filmu
Youssef, A.E. ; Švindrych, Z. ; Hadač, J. ; Janů, Zdeněk
We present high resolution measurements of temperature dependence of low frequency ac magnetic susceptibility of superconducting Nb thin film in perpendicular time-varying periodic applied magnetic fields. We map this data, including harmonics, to the ac susceptibility calculated on basis of the complete analytical model of magnetization of thin superconducting disk in critical state. We find an excellent agreement between the measured and model data for temperatures up to 0.9997Tc
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