Original title: Catalysts for ozone sensitivity enhancement of thin sensors
Authors: Fryček, R. ; Myslík, V. ; Vrňata, M. ; Jelínek, Miroslav
Document type: Papers
Conference/Event: Electronic Devices Systems Conference 2003 /10./, Brno (CZ), 2003-09-09 / 2003-09-10
Year: 2003
Language: eng
Abstract: Inorganic(In.sub.2./sub.O.sub.3./sub.) and organic (InAcAc) thin films were created by pulsed laser deposition on special alumina chips by KrF excimer laser.Influence of addition catalyst was studied. Catalysts Ni, Fe and Zr were deposited by sputtering in sequence. After each step sensitivity and dynamic behavior were measured.
Keywords: gas sensors, catalyst; pulsed laser deposition; thin film
Project no.: CEZ:AV0Z1010914 (CEP), GA106/00/P011 (CEP), GA104/03/0406 (CEP), GP106/01/P089 (CEP)
Funding provider: GA ČR, GA ČR, GA ČR
Host item entry: Electronic Devices and Systems 03 - Proceedings, ISBN 80-214-2452-4

Institution: Institute of Physics AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0032377

Permalink: http://www.nusl.cz/ntk/nusl-21896


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