Original title: Diamond chemical vapor deposition
Authors: Kromka, Alexander
Document type: Papers
Conference/Event: Winter educational seminar /2./, Rokytnice n. J. (CZ), 2011-02-16 / 2011-02-18
Year: 2011
Language: eng
Abstract: Present paper reviews growth of diamond thin films by various chemical vapor deposition processes. Basic characteristics and common features of processes are pointed out with a respect to quality of grown films and standard process parameters. Novel and non-standard diamond syntheses techniques are briefly discussed.
Keywords: chemical vapor deposition; diamond; hot filament; microwave plasma; thin film
Project no.: CEZ:AV0Z10100521 (CEP), MEB0810082 (CEP), KAN400100701 (CEP), GAP108/11/0794 (CEP)
Funding provider: GA MŠk, GA AV ČR, GA ČR
Host item entry: Proceedings of the 2nd Winter Education Seminar, ISBN 978-80-260-0911-5

Institution: Institute of Physics AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0208099

Permalink: http://www.nusl.cz/ntk/nusl-109901


The record appears in these collections:
Research > Institutes ASCR > Institute of Physics
Conference materials > Papers