|
| |
|
|
Influence of magnetic field upon detection in environmental SEM
Romanovský, Vladimír ; Neděla, Vilém
The single-pole magnetic lens has been constructed and placed co-axially with the beam of primary electrons below the specimen holder. A scheme of its configuration is shown in Figure 1. The lens had to be designed with consideration to the size of space available in the specimen chamber. The situation was complicated by the necessity of placing a magnet below the specimen holder. For this reason the height of 30 mm and diameter of 55 mm of the magnetic lens were chosen. The dependency of induction B on the current I through the magnet was measured by a T-meter.
|
|
|
Imaging of the voltage contrast in environmental SEM
Romanovský, Vladimír ; Autrata, Rudolf
Current methodology of imaging in the scanning electron microscopy is based on the detection of signal electrons that carry topografic and materialcontrast of specimens under study. Electronic devices can be observed because in their standard working mode voltage differences on component surfaces are visualized by means of the voltage contrast. This contrast can be acquired in nearly any commercially available scanning electron microscopeby detection and subsequent analysis of secondary electrons.
|
|
|
Electrostatic mini SLEEM for surface studies
Romanovský, Vladimír ; El-Gomati, M.
Exploitation of the low-energy electrons is advantageous for several reasons. One of them is their smaller penetration depth into the material, which reveals itself as favourable for the surface analysis. Using the low-energy electrons even causes partial, and in some cases total elimination ofcharging effects at non-conductive or slightly conductive specimens. Slowprimary electrons (PE) cause only reduced radiation damage of specimens.
|
|
|
The possibilities of using FFT for rating the quality of detected signal in ESEM
Přichystal, Vladimír
The main demand for processing of images from scanning electron microscope is acquirement of the best quality of raster image and description of attributes of micrographs and possibility of their comparison with other micrographs. Therefore software was compiled, which serves to numerical calculation of the Fast Fourier Transform (FFT) of micrographs, evaluation and development of their quality.
|
|
| |
|
|
Ultrahigh vacuum scanning low energy electron microscope (UHV SLEEM) for surface studies
Müllerová, Ilona ; Frank, Luděk
The aim of project is to study clean and well-defined surfaces via interaction of electrons at energies from 0 to 25 keV with a high spatial resolution. During the period 1995-2001 we have built an Ultrahigh Vacuum Scanning Low Energy Electron Microscope for surface studies. The image resolution below 50 nm can be achieved at 10 eV. The residual pressure in the specimen vicinity is 10.sup.-10./sup. mbar. The paper briefly describes main parameters of the instrument.
|
|
| |
|
| |
|
|
Temperature controlled cathode heating in the electron gun
Horáček, Miroslav
The paper describes how the lifetime of the directly heated tungsten cathode can be substantially extended by automatic stabilisation of its temperature measured by its luminance. Further it is shown that the end of the life (the break) of the cathode can be predicted, giving the operating personnel the chance to avoid unexpected break during the experiment.
|
guest ::
