Original title: Ultrahigh vacuum scanning low energy electron microscope (UHV SLEEM) for surface studies
Authors: Müllerová, Ilona ; Frank, Luděk
Document type: Papers
Conference/Event: CSEM, Vranovská Ves (CZ), 2002-02-08 / 2002-02-09
Year: 2002
Language: eng
Abstract: The aim of project is to study clean and well-defined surfaces via interaction of electrons at energies from 0 to 25 keV with a high spatial resolution. During the period 1995-2001 we have built an Ultrahigh Vacuum Scanning Low Energy Electron Microscope for surface studies. The image resolution below 50 nm can be achieved at 10 eV. The residual pressure in the specimen vicinity is 10.sup.-10./sup. mbar. The paper briefly describes main parameters of the instrument.
Keywords: UHV SLEEM
Project no.: CEZ:AV0Z2065902 (CEP), IAA1065901 (CEP)
Funding provider: GA AV ČR
Host item entry: Proceedings of the 2nd annual meeting of the Czechoslovak microscopy society, ISBN 80-238-8749-1

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0101100

Permalink: http://www.nusl.cz/ntk/nusl-29538


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers