Original title:
Computer controlled SEM Tesla BS 350 with cathode for detection of slow and Auger electrons
Authors:
Hrnčiřík, Petr Document type: Papers Conference/Event: CSEM, Vranovská Ves (CZ), 2002-02-08 / 2002-02-09
Year:
2002
Language:
eng Abstract:
The goal of the experiment is an in-situ comparison of the signals given by Auger and by slow electrons (down to 10 eV) with a high resolution. These open new possibilities of getting information about the material and topographical contrast from real surfaces. A new experimental device was designed for this intention, which is presented in this contribution.
Keywords:
in-situ comparison of the signals; slow electrons Project no.: CEZ:AV0Z2065902 (CEP) Host item entry: Proceedings of the 2nd annual meeting of the Czechoslovak microscopy society, ISBN 80-238-8749-1
Institution: Institute of Scientific Instruments AS ČR
(web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences. Original record: http://hdl.handle.net/11104/0101098