Original title:
Influence of magnetic field upon detection in environmental SEM
Authors:
Romanovský, Vladimír ; Neděla, Vilém Document type: Papers Conference/Event: CSEM, Vranovská Ves (CZ), 2002-02-08 / 2002-02-09
Year:
2002
Language:
eng Abstract:
The single-pole magnetic lens has been constructed and placed co-axially with the beam of primary electrons below the specimen holder. A scheme of its configuration is shown in Figure 1. The lens had to be designed with consideration to the size of space available in the specimen chamber. The situation was complicated by the necessity of placing a magnet below the specimen holder. For this reason the height of 30 mm and diameter of 55 mm of the magnetic lens were chosen. The dependency of induction B on the current I through the magnet was measured by a T-meter.
Keywords:
sigle-pole magnetic lens Project no.: CEZ:AV0Z2065902 (CEP), GA102/01/1271 (CEP) Funding provider: GA ČR Host item entry: Proceedings of the 2nd annual meeting of the Czechoslovak microscopy society, ISBN 80-238-8749-1
Institution: Institute of Scientific Instruments AS ČR
(web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences. Original record: http://hdl.handle.net/11104/0101105