Original title: SEM imaging of nonconductive powders at critical energy
Authors: Zobačová, Jitka ; Zdražil, Josef ; Müllerová, Ilona ; Frank, Luděk
Document type: Papers
Conference/Event: CSEM, Vranovská Ves (CZ), 2002-02-08 / 2002-02-09
Year: 2002
Language: eng
Abstract: As a rule, at electron energies normally used in SEM, the total electron yield is lower then 100% and some negative charge is dissipated in the specimen. This prevents observation of nonconductors in which the injected charge stays localized and its field destroys both geometry and brightness scale of the image.
Keywords: critical energy; SEM; slow secondary electronscathode heating
Project no.: CEZ:AV0Z2065902 (CEP)
Host item entry: Proceedings of the 2nd annual meeting of the Czechoslovak microscopy society, ISBN 80-238-8749-1

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0101099

Permalink: http://www.nusl.cz/ntk/nusl-29537


The record appears in these collections:
Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers