Original title: Electrostatic mini SLEEM for surface studies
Authors: Romanovský, Vladimír ; El-Gomati, M.
Document type: Papers
Conference/Event: CSEM, Vranovská Ves (CZ), 2002-02-08 / 2002-02-09
Year: 2002
Language: eng
Abstract: Exploitation of the low-energy electrons is advantageous for several reasons. One of them is their smaller penetration depth into the material, which reveals itself as favourable for the surface analysis. Using the low-energy electrons even causes partial, and in some cases total elimination ofcharging effects at non-conductive or slightly conductive specimens. Slowprimary electrons (PE) cause only reduced radiation damage of specimens.
Keywords: charging effect; low-energy electrons; non-conductive specimens
Project no.: CEZ:AV0Z2065902 (CEP)
Host item entry: Proceedings of the 2nd annual meeting of the Czechoslovak microscopy society, ISBN 80-238-8749-1

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0101103

Permalink: http://www.nusl.cz/ntk/nusl-29541


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