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3D Construction View of Differential Pumping Chamber with Detector Board of Environmental Scanning Electron Microscope
Neděla, Vilém
This paper deals with construction of the differential pumping chamber with a detector board for adaptation of the scanning electron microscope (SEM) to the environmental scanning electron microscope (ESEM). ESEM allows work at higher pressure in some parts of the microscope. It focuses especially on the 3D construction view of the differential pumping chamber together with the detector board of the differential pumping chamber and it comments reasons of necessity of the assembly of these parts into the environmental scanning electron microscope.
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Angular distribution of backscattered electrons signal in Environmental Scanning Electron Microscopy
Wandrol, Petr
The aim of this work was to verify an influence of the collection solid angle on a magnitude of detected signal. The presented results of measurement were gained by an observation of the specimen of carbon covered with a thin layer of gold. The primary beam accelerating voltage was 20kV. The collection solid angle was changed by application of aluminium masks with aperture diameters 2,3,4,8,16 mm mounted on scintillator. As a working environment in the specimen chamber air and saturated water vapour were used.
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Adaptation of scanning electron microscope to environmental scanning electron microscope
Neděla, Vilém
This paper deals with adaptation of the scanning electron microscope (SEM) to the environmental scanning electron microscope (ESEM). It focuses especially to the construction and assembly of the differential pumping chamber together with the detector board of the differential pumping chamber and it comments reasons of necessity of the assembly of these parts in the environmental scanning electron microscope.
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Study of contrast mechanisms in environmental scanning electron microscopy
Wandrol, Petr
The main goal of the work is study of contrast materials in environmental scanning electron microscopy. I will concentrate to the design and construction of the original detector of secondary electrons, which is not influenced by backscattered electrons as well as to scintillation detector of backscattered electrons on the basis of single-crystal YAP in the dissertation work. For successful solution of the topic it will be necessary to manage the theory of the influence of magnetic fields on trajectories of electrons. The knowledge of the software SIMION, version 7.0 will be necessary too, together with studying of the theory for assessment of suitable vacuum conditions in differential chambers.
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Detection of backscattered electrons in the low energy area of the spectra of the electron beam in SEM
Přichystal, Vladimír
The work focuses especially on research of a detector for conjoint as well as separated detection of backscattered (BSE) and secondary (SE) electrons in a scanning electron microscope in conditions, where the energy of the impacting beam of primary electrons onto a specimen is 1 keV and less. The main goal is a design and realization of a detector for the electron scanning microscope JSM-6700F by the firm JEOL and following measurement of properties of this detector and its influence on the operation of the microscope.
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