Original title: 3D Construction View of Differential Pumping Chamber with Detector Board of Environmental Scanning Electron Microscope
Authors: Neděla, Vilém
Document type: Papers
Conference/Event: Elektrotechnika a informatika 2003, Nečtiny (CZ), 2003-10-15 / 2003-10-16
Year: 2003
Language: eng
Abstract: This paper deals with construction of the differential pumping chamber with a detector board for adaptation of the scanning electron microscope (SEM) to the environmental scanning electron microscope (ESEM). ESEM allows work at higher pressure in some parts of the microscope. It focuses especially on the 3D construction view of the differential pumping chamber together with the detector board of the differential pumping chamber and it comments reasons of necessity of the assembly of these parts into the environmental scanning electron microscope.
Keywords: 3D view; detector board; ESEM
Project no.: CEZ:AV0Z2065902 (CEP), GA102/01/1271 (CEP), IBS2065107 (CEP)
Funding provider: GA ČR, GA AV ČR
Host item entry: 4. ročník přehlídky doktorských prací Elektrotechnika a informatika 2003, ISBN 80-7082-993-1

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0101288

Permalink: http://www.nusl.cz/ntk/nusl-29604


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers