Original title: Adaptation of scanning electron microscope to environmental scanning electron microscope
Authors: Neděla, Vilém
Document type: Papers
Conference/Event: STUDENT EEICT 2003, Brno (CZ), 2003-04-24
Year: 2003
Language: eng
Abstract: This paper deals with adaptation of the scanning electron microscope (SEM) to the environmental scanning electron microscope (ESEM). It focuses especially to the construction and assembly of the differential pumping chamber together with the detector board of the differential pumping chamber and it comments reasons of necessity of the assembly of these parts in the environmental scanning electron microscope.
Keywords: detector; differential pumping chamber; scanning electron microscope
Project no.: CEZ:AV0Z2065902 (CEP), GA102/01/1271 (CEP), IBS2065107 (CEP)
Funding provider: GA ČR, GA AV ČR
Host item entry: Proceedings of the 9th Conference and Competition Student EEICT 2003 - Papers written by postgraduate students, ISBN 80-214-2379-X

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0101277

Permalink: http://www.nusl.cz/ntk/nusl-29595


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers