Original title: Collection solid angle of backscattered electrons in environmental scanning electron microscopy
Authors: Wandrol, Petr
Document type: Papers
Conference/Event: STUDENT EEICT 2003, Brno (CZ), 2003-04-24
Year: 2003
Language: eng
Abstract: This paper deals with an influence of the collection solid angle on a magnitude of detected signal. The presented results of measurement were gained by an observation of the specimen of carbon covered with a thin layer of gold. The collection solid angle was changed by application of aluminium masks mounted on the scintillator. As a working environment in the specimen chamber air and saturated water steam were used.
Keywords: backscattered; electron microscopy; environmental; elektronová mikroskopie
Project no.: GA102/01/1271 (CEP), IBS2065107 (CEP), CEZ:AV0Z2065902 (CEP)
Funding provider: GA ČR, GA AV ČR
Host item entry: Proceedings of the 9th Conference and Competition Student EEICT 2003 - Papers written by postgraduate students, ISBN 80-214-2379-X

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0101279

Permalink: http://www.nusl.cz/ntk/nusl-29597


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers