Original title:
Collection solid angle of backscattered electrons in environmental scanning electron microscopy
Authors:
Wandrol, Petr Document type: Papers Conference/Event: STUDENT EEICT 2003, Brno (CZ), 2003-04-24
Year:
2003
Language:
eng Abstract:
This paper deals with an influence of the collection solid angle on a magnitude of detected signal. The presented results of measurement were gained by an observation of the specimen of carbon covered with a thin layer of gold. The collection solid angle was changed by application of aluminium masks mounted on the scintillator. As a working environment in the specimen chamber air and saturated water steam were used.
Keywords:
backscattered; electron microscopy; environmental; elektronová mikroskopie Project no.: GA102/01/1271 (CEP), IBS2065107 (CEP), CEZ:AV0Z2065902 (CEP) Funding provider: GA ČR, GA AV ČR Host item entry: Proceedings of the 9th Conference and Competition Student EEICT 2003 - Papers written by postgraduate students, ISBN 80-214-2379-X
Institution: Institute of Scientific Instruments AS ČR
(web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences. Original record: http://hdl.handle.net/11104/0101279