Original title: Construction of differential pumping chamber with detector board for adaptation of scanning electron microscope working in high pressure
Authors: Neděla, Vilém
Document type: Papers
Conference/Event: STUDENT EEICT 2003, Brno (CZ), 2003-04-24
Year: 2003
Language: eng
Abstract: This paper deals with adaptation of the scanning electron microscope (SEM) to the environmental scanning electron microscope (ESEM). ESEM allows work at higher pressure in some parts of the microscope. It focuses especially to the construction and assembly of the differential pumping chamber together with the detector board of the differential pumping chamber and it comments reasons of necessity of the assembly of these parts in the environmental scanning electron microscope.
Keywords: detector; detector board; differential pumping chamber
Project no.: CEZ:AV0Z2065902 (CEP), GA102/01/1271 (CEP), IBS2065107 (CEP)
Funding provider: GA ČR, GA AV ČR
Host item entry: Proceedings of the International Conference and Competition Student EEICT 2003, ISBN 80-214-2401-X

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0101278

Permalink: http://www.nusl.cz/ntk/nusl-29596


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers