Original title: Měření mechanických vlastností tenkých vrstev pomocí nanokomprese
Translated title: Measurement of mechanical properties of thin films by nanocompression
Authors: Kuběna, Ivo ; Kruml, Tomáš ; Hutař, Pavel ; Boháč, Petr ; Stranyánek, Martin ; Čtvrtlík, Radim ; Pánek, P. ; Vystavěl, T.
Document type: Papers
Conference/Event: Vrstvy a povlaky 2008, Rožnov pod Radhoštěm (CZ), 2008-09-29 / 2008-09-30
Year: 2008
Language: cze
Abstract: [cze] [eng]
Technikou fokusovaných iontových byly připraveny malé kompresní válcové vzorky z tenké vrstvy Al-1.5%Cu. Tyto vzorky byly deformovány v kompresi s použitím nanoindentoru a plochého diamantového hrotu. Byly tak získány závislosti napětí-deformace s poměrně vysokou přesností. Mechanical properties of thin films are not easy to be measured. This is particularly true in the case of plastic properties as the yield point, the work hardening rate or the ultimate stress. Nevertheless, such parameters are needed e.g. in the design of integrated circuits where the thermal stresses may lead to mechanical failure of the component. We applied two modern experimental facilities, the focused ion beam and the nanoindentation for exact measurement of plastic properties of a Al-1.5%Cu thin film prepared by PVD, used for electrical connection of integrated circuits. By FIB milling, cylindrical specimens were prepared. The height of the specimens was equal to the film thickness (2 m) and their diameter was about 1.3 m. These specimens were subjected to the compressive loading using the nanoindenter equipped by a flat punch. Stress-strain curves of the film were obtained rather precisely.
Keywords: Al thin film; nanocompression; yield point
Project no.: CEZ:AV0Z20410507 (CEP), CEZ:AV0Z10100522 (CEP)
Host item entry: Vrstvy a povlaky 2008, ISBN 978-80-969310-7-1

Institution: Institute of Physics of Materials AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0004821

Permalink: http://www.nusl.cz/ntk/nusl-39328


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Research > Institutes ASCR > Institute of Physics of Materials
Conference materials > Papers