Original title: Influence of the cross-section of gas molecules upon detection on the environmental SEM
Authors: Neděla, Vilém ; Romanovský, Vladimír
Document type: Papers
Conference/Event: CSEM, Vranovská Ves (CZ), 2002-02-08 / 2002-02-09
Year: 2002
Language: eng
Abstract: Environmental scanning electron microscopy exploits presence of gas or water vapour in the specimen chamber. Molecules of the gaseous environment can be ionised by electrons, which can compensate the surface charge on thespecimen (at the pressure approx. 200 Pa). At higher pressure of gases and water vapour in the specimen chamber (more than 609 Pa) specimens with content of water can be observed.
Keywords: SEM; specimen chamber
Project no.: CEZ:AV0Z2065902 (CEP), IBS2065107 (CEP)
Funding provider: GA AV ČR
Host item entry: Proceedings of the 2nd annual meeting of the Czechoslovak microscopy society, ISBN 80-238-8749-1

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0101101

Permalink: http://www.nusl.cz/ntk/nusl-29539


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers