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Development and Application of an UHV Equipment for Deposition of Thin Films (Atomic and Ion Systems)
Mach, Jindřich ; Čech, Vladimír (referee) ; Lencová, Bohumila (referee) ; Šikola, Tomáš (advisor)
In the thesis the development of two equipment for preparation of ultrathin films under ultrahign vacuum conditions (UHV) is discussed. Here, additionally to a brief description of theoretical principles, more details on the design of these units are given. In the first part the design of a thermal source of oxygen or hydrogen atomic beams is discussed. Further, a design and construction of an ion–atomic beam source for ion-beam assisted deposition of thin films is detailed. The source combines the principles of an efusion cell and electron-impact ion beam source generating ions of (30 – 100) eV energy. The source has been successfully applied for the growth of GaN on the Si(111) 7x7 substrate under room temperature.
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Testing and optimization of an ion source
Glajc, Petr ; Král,, Jaroslav (referee) ; Kolíbal, Miroslav (advisor)
A thorough description of the testing of a saddle-field ion source is presented in the diploma thesis. The most important experimental results, such as Faraday cup measurements of the ion beam current profile and of the ion energy spectra, are included. Based on these results it is shown that the optimized ion source works correctly and according to the expectations. At the end of the thesis, the development of the ion-optical and construction design of the focusing optics is described. The manufactured optics assembly attached to the ion source is also shown.
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Optimization of ion source with saddle field
Zálešák, Marek ; Voborný, Stanislav (referee) ; Mach, Jindřich (advisor)
The goal of my bachelor's thesis was to make literature search about ion source applications. The next goal was to create models of saddle field ion source and find the best settings of the ion source. At first the most necessary changes were made to make the ion source operational. Then the deflection optics was developed that cause a deviation of the beam from the geometric axis of the ion source.
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Development of Atomic- and Ion Beam Sources
Šamořil, Tomáš ; Lencová, Bohumila (referee) ; Mach, Jindřich (advisor)
The objective of this master thesis was to provide the optimization of an ion-atom beam source for the improvement of its properties. The improvement of the parameters increases the efficiency of the source during the deposition of gallium nitride ultrathin films (GaN) being important in microeletronics and optoelectronics. After optimization, the depositions of GaN ultrathin films on Si(111) 7x7 at lower temperatures (
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Optimization of the Colutron Ion Source
Horký, Michal ; Mach, Jindřich (referee) ; Voborný, Stanislav (advisor)
This bachelor’s thesis concerns with design and assembly of Colutron ion source which produces beam of nitrogen ions with energy from tens to thousand eV. Production of ions and the principle of Colutron ion source is described in the first part. The second part of the thesis is related to the modification and assembly of commercial Colutron ion source. Finally the parameters of the ion beam have been measured for different extraction electrodes and operating parameters in testing apparatus.
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Design of an ion source for sputtering
Glajc, Petr ; Voborný, Stanislav (referee) ; Kolíbal, Miroslav (advisor)
This bachelor's thesis deals with the development of a new type of an ion source. The aim is to design a saddle-field ion source for sputtering. The unique property of the design is that it combines classical cylindrical-symmetry saddle-field ion source with a hot cathode made of tungsten. In the first part of the thesis an overview of the published research in the field of ion sources is presented. The second part deals with an electrostatic-optical design of the source and with simulations of the electrostatic field including trajectories of electrons and ions. Also a crude estimation of the source parameters is made. In the third part the construction design based on previous simulations is described.
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Computer control of the deposition process
Pavera, Michal ; Voborný, Stanislav (referee) ; Urbánek, Michal (advisor)
This bachaloers thesis deals with automation of the deposition process of the ultrathin layers by IBAD method. One of the tasks is to design motorized target and shutter manipulator. The thesis therefore contain drawings of these manipulators. Which enable their control by stepper motors. Second task is to design of electronics and program control of primary and secondary ion source. In this part is described connection of the system with the computer using AD/DA converters and the appropriate programming. Last part of the thesis deals with differences between automated and manual control of the system, their advantages and disadvantages.
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Development of miniaturized ion source for atmospheric pressure chemical ionization (HPLC/MS)
Rumlová, Barbora ; Cvačka, Josef (advisor) ; Jelínek, Ivan (referee)
ionization in which the main component is a heated glass microfluidic chip. The ion source was assembled from the mirocfluidic chip placed on a micromanipulator and a needle electrode creating a corona discharge. The optimization of geometric arrangement of these components towards to inner heated capillary of the mass spectrometer LCQ Fleet (Thermo) was based on the signal intensity of reserpine. The solution of reserpine with concentration 10 µg/ w y g g y g . Furthermore, the flow rate of the nebulizing gas was optimized. The signal intensity of protonated molecule was two orders of magnitude higher than the signal generated by the commercial ion source for APCI (Thermo) using the same mass flow rate of the analyte. High signal instability of the detected ions is the persisting problem of the miniaturized ion source. Key words: mass spectrometry, micro APCI, microfluidic chip
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Optimization of ion source with saddle field
Zálešák, Marek ; Voborný, Stanislav (referee) ; Mach, Jindřich (advisor)
The goal of my bachelor's thesis was to make literature search about ion source applications. The next goal was to create models of saddle field ion source and find the best settings of the ion source. At first the most necessary changes were made to make the ion source operational. Then the deflection optics was developed that cause a deviation of the beam from the geometric axis of the ion source.
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