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Design of a suitable length standard for nanp-CT measuring device
Kožiol, Martin ; Jankových, Róbert (referee) ; Šrámek, Jan (advisor)
The diploma thesis deals with the design of three length standards, which will serve to ensure metrological traceability between Rigaku nano3DX, SIOS NMM-1, Zeiss UPMC Carat 850 and other devices located at ÚVSSR BUT and CEITEC Brno. The first part of the thesis focuses on the theoretical acquaintance with concepts closely related to the issue of ensuring metrological traceability. In addition, this section deals with computed tomography and the description of individual devices. The second part of the thesis is devoted to design, production process and testing of individual standards. The last part describes the ensuring the calibration of the smallest standard, the so-called Nano standard and the calculation of the uncertainty of measuring its calibrated length. At the end of the thesis, the outputs of these activities are evaluated.
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Determination Accuracy of Measurement in Nanometrology
Šrámek, Jan ; Číp, Ondřej (referee) ; Tykal, Miroslav (referee) ; Jankových, Róbert (advisor)
The presented doctoral thesis deals with measurements of extremely small sizes in nanometrology using a touch probe, which constitutes a part of a three-coordinate measuring system. It addresses a newly developed method of exact measurements in nanometrology by touch probes. The aim of this work was to expand the measurement options of this device and design a methodology proposal for the measurement of small parts, including the determination of accuracy of measurement of this device when used in nanometrology. The work includes the new methodology for the calculation of uncertainty of measurement, which constitutes a keystone in determining the accuracy of measurement of a accuracy three coordinate measuring system (hereinafter only nano-CMM). The first part of the doctoral thesis analyzes the present situation in the area of evaluation of accuracy of measurement in very accurate length measurements. It defines and describes individual methods implemented in the determination of accuracy of measurement on the instrument nano-CMM. A great emphasis is placed on the methodology of the measurement uncertainty, which draws from the author’s experience as a metrologist working in the laboratories of the Department of Primary nanometrology and technical length, Czech Metrology Institute Brno (hereinafter only CMI Brno). The second part of the doctoral thesis focuses on the determination of accuracy of length measurement in nanometrology, using a large set of measurements that were carried out under the reproducibility and repeatability conditions. There is also described and tested a model procedure utilizing the Monte Carlo method to simulate the measuring system nano-CMM in order to extent the newly created methodology of the measurement of uncertainty using a touch probe on the instrument nano-CMM. A substantial part of this doctoral thesis provides a detailed evaluation of results obtained from experiments that were executed under the repeatability and reproducibility conditions, especially for the purposes of the determination of the uncertainty of measurement. In this doctoral thesis, the uncertainty of measurement is chosen to quantify the accuracy of measurement of the instrument nano-CMM. The final part of this thesis summarizes the knowledge obtained during the scientific research and provides its evaluation. For the methodology used to determine the accuracy of measurement in nanometrology, it also outlines the future development in the area of scientific research, including the practical use in metrological traceability and extremely accurate measurements for customers. Furthermore, it deals with the possible use of other scanning systems compatible with the instrument nano-CMM.
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Advanced Interferometric Methods of Coordinates Measurement
Holá, Miroslava ; Klapetek,, Petr (referee) ; Mrňa, Libor (referee) ; Lazar, Josef (advisor)
This thesis addresses particular topics in the field of the length metrology for nanometrology. Nanometrology deals with dimensional measurements of micro- and nanostructures with a high spatial resolution. It typically combines a microscope imaging with a precise coordinate measurement, usually capable of nanometre resolution using the state-of-art laser interferometry techniques. The development in this field is driven, among others, by emerging advanced nanotechnologies that demand to push further the capabilities and limits of the interferometric techniques to make the nanometre-level dimensional measurement of nanostructures possible. The principal limitations of current systems are the environmental conditions and especially the fluctuations in the refractive index of air. The theoretical part of this thesis aim at analysis of individual parts of laser interferometer. I oriented myself on the study of their advantages/disadvantages and further also the possibilities of their industrial applications. The second part of the thesis presents my work that focused on the influence of the refractive index of air (RIA) on the measurement uncertainty. I experimentally demonstrated an interferometric system with a self-cancellation RIA fluctuations: a transparent photodetector is used for the measurement of the standing wave along the axis of a passive resonator, where the resonator also serves as a reference for the laser wavelength stabilisation. Another optical arrangement, based on a setup of several Michelson interferometers, represents a combination of an interferometer and a refractometer into a single system. This setup was used to study the behaviour of the ambient airflow with respect to the optical path difference and physical separation of the interferometer’s and refractometer’s path. Based on the experimental results I proposed new arrangements for shape measuring interferometers, which combine length interferometry and a tracking refractometer for the direct compensation of RIA fluctuations with geometrically adjacent optical beams. The results indicate an improvement in RIA fluctuation induced uncertainty by a factor of 100. Third part describes the design and implementation of interferometric systems for specific applications. For the industrial environment I developed a compact interferometric displacement gauge which is designed to allow nanometre level measurement using a simplified interferometer construction. For coordinate measurement of the position of the sample up to six degrees of freedom, I realised a compact modular interferometric system, which represents a unique setup together with a stabilised laser source. To measure the position of the sample in an electron beam writer chamber, I designed and implemented a differential interferometer that works in the near infrared domain and uses a new detection method developed for this system. In the fourth part I describe the realisation of a high-speed interferometer with a differential arrangement, which allows evaluation of high-cycle fatigue in material engineering. This method of studying high-cycle fatigue should be beneficial for both the basic research and the engineering practice.
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Design of a suitable length standard for nanp-CT measuring device
Kožiol, Martin ; Jankových, Róbert (referee) ; Šrámek, Jan (advisor)
The diploma thesis deals with the design of three length standards, which will serve to ensure metrological traceability between Rigaku nano3DX, SIOS NMM-1, Zeiss UPMC Carat 850 and other devices located at ÚVSSR BUT and CEITEC Brno. The first part of the thesis focuses on the theoretical acquaintance with concepts closely related to the issue of ensuring metrological traceability. In addition, this section deals with computed tomography and the description of individual devices. The second part of the thesis is devoted to design, production process and testing of individual standards. The last part describes the ensuring the calibration of the smallest standard, the so-called Nano standard and the calculation of the uncertainty of measuring its calibrated length. At the end of the thesis, the outputs of these activities are evaluated.
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Determination Accuracy of Measurement in Nanometrology
Šrámek, Jan ; Číp, Ondřej (referee) ; Tykal, Miroslav (referee) ; Jankových, Róbert (advisor)
The presented doctoral thesis deals with measurements of extremely small sizes in nanometrology using a touch probe, which constitutes a part of a three-coordinate measuring system. It addresses a newly developed method of exact measurements in nanometrology by touch probes. The aim of this work was to expand the measurement options of this device and design a methodology proposal for the measurement of small parts, including the determination of accuracy of measurement of this device when used in nanometrology. The work includes the new methodology for the calculation of uncertainty of measurement, which constitutes a keystone in determining the accuracy of measurement of a accuracy three coordinate measuring system (hereinafter only nano-CMM). The first part of the doctoral thesis analyzes the present situation in the area of evaluation of accuracy of measurement in very accurate length measurements. It defines and describes individual methods implemented in the determination of accuracy of measurement on the instrument nano-CMM. A great emphasis is placed on the methodology of the measurement uncertainty, which draws from the author’s experience as a metrologist working in the laboratories of the Department of Primary nanometrology and technical length, Czech Metrology Institute Brno (hereinafter only CMI Brno). The second part of the doctoral thesis focuses on the determination of accuracy of length measurement in nanometrology, using a large set of measurements that were carried out under the reproducibility and repeatability conditions. There is also described and tested a model procedure utilizing the Monte Carlo method to simulate the measuring system nano-CMM in order to extent the newly created methodology of the measurement of uncertainty using a touch probe on the instrument nano-CMM. A substantial part of this doctoral thesis provides a detailed evaluation of results obtained from experiments that were executed under the repeatability and reproducibility conditions, especially for the purposes of the determination of the uncertainty of measurement. In this doctoral thesis, the uncertainty of measurement is chosen to quantify the accuracy of measurement of the instrument nano-CMM. The final part of this thesis summarizes the knowledge obtained during the scientific research and provides its evaluation. For the methodology used to determine the accuracy of measurement in nanometrology, it also outlines the future development in the area of scientific research, including the practical use in metrological traceability and extremely accurate measurements for customers. Furthermore, it deals with the possible use of other scanning systems compatible with the instrument nano-CMM.
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Interferometric System for Length Calibration on a Metre Scale
Jedlička, Petr ; Mikel, Břetislav ; Řeřucha, Šimon ; Matěj, Z. ; Herman, O. ; Holá, Miroslava ; Jelínek, Michal ; Pavelka, Jan ; Číp, Ondřej ; Lazar, Josef
Interferometric system is designed to calibrate the measurement frame, used for periodic assessment of the inner geometry of the reactor active zone chassis. Calibration lenght is up to 3300mm.
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Advanced Interferometric Methods of Coordinates Measurement
Holá, Miroslava ; Klapetek,, Petr (referee) ; Mrňa, Libor (referee) ; Lazar, Josef (advisor)
This thesis addresses particular topics in the field of the length metrology for nanometrology. Nanometrology deals with dimensional measurements of micro- and nanostructures with a high spatial resolution. It typically combines a microscope imaging with a precise coordinate measurement, usually capable of nanometre resolution using the state-of-art laser interferometry techniques. The development in this field is driven, among others, by emerging advanced nanotechnologies that demand to push further the capabilities and limits of the interferometric techniques to make the nanometre-level dimensional measurement of nanostructures possible. The principal limitations of current systems are the environmental conditions and especially the fluctuations in the refractive index of air. The theoretical part of this thesis aim at analysis of individual parts of laser interferometer. I oriented myself on the study of their advantages/disadvantages and further also the possibilities of their industrial applications. The second part of the thesis presents my work that focused on the influence of the refractive index of air (RIA) on the measurement uncertainty. I experimentally demonstrated an interferometric system with a self-cancellation RIA fluctuations: a transparent photodetector is used for the measurement of the standing wave along the axis of a passive resonator, where the resonator also serves as a reference for the laser wavelength stabilisation. Another optical arrangement, based on a setup of several Michelson interferometers, represents a combination of an interferometer and a refractometer into a single system. This setup was used to study the behaviour of the ambient airflow with respect to the optical path difference and physical separation of the interferometer’s and refractometer’s path. Based on the experimental results I proposed new arrangements for shape measuring interferometers, which combine length interferometry and a tracking refractometer for the direct compensation of RIA fluctuations with geometrically adjacent optical beams. The results indicate an improvement in RIA fluctuation induced uncertainty by a factor of 100. Third part describes the design and implementation of interferometric systems for specific applications. For the industrial environment I developed a compact interferometric displacement gauge which is designed to allow nanometre level measurement using a simplified interferometer construction. For coordinate measurement of the position of the sample up to six degrees of freedom, I realised a compact modular interferometric system, which represents a unique setup together with a stabilised laser source. To measure the position of the sample in an electron beam writer chamber, I designed and implemented a differential interferometer that works in the near infrared domain and uses a new detection method developed for this system. In the fourth part I describe the realisation of a high-speed interferometer with a differential arrangement, which allows evaluation of high-cycle fatigue in material engineering. This method of studying high-cycle fatigue should be beneficial for both the basic research and the engineering practice.
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Nanopositioning with detection of a standing wave
Holá, M. ; Hrabina, J. ; Číp, O. ; Fejfar, Antonín ; Stuchlík, Jiří ; Kočka, Jan ; Oulehla, J. ; Lazar, J.
A measuring technique is intended for displacement and position sensing over a limited range with detection of standing-wave pattern inside of a passive Fabry-Perot cavity. In this concept we consider locking of the laser optical frequency and the length of the Fabry-Perot cavity in resonance. Fixing the length of the cavity to e.g. a highly stable mechanical reference allows stabilizing wavelength of the laser in air and thus to eliminate especially the faster fluctuations of refractive index of air due to air flow and inhomogeneity. Detection of the interference maxima and minima within the Fabry-Perot cavity along the beam axis has been tested and proven with a low loss transparent photodetector with very low reflectivity. The transparent photodetector is based on a thin polycrystalline silicon layer. Reduction of losses was achieved thanks to a design as an optimized set of interference layers acting as an antireflection coating. The principle is demonstrated on an experimental setup.
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Interferometric measurement system for cost effective e-beam writer
Řeřucha, Šimon ; Šarbort, Martin ; Lazar, Josef ; Číp, Ondřej
The reliability of nanometer track writing in the large scale chip manufacturing process depends mainly on a precise positioning of the e-beam writer moving stage. The laser interferometers are usually employed to control this positioning, but their complicated optical scheme leads to an expensive instrument which increases the e-beam writer’s manufacturing costs. We present a new design of an interferometric system useful in a currently developed cost effective e-beam writers. Our approach simplifies the optical scheme of known industrial interferometers and shifts the interference phase detection complexity from optical domain to the digital signal processing part. Besides the effective cost, the low number of optical components minimizes the total uncertainty of this measuring instrument. The scheme consists of a single wavelength DFB laser working at 1550 nm, one beam splitter, measuring and reference reflectors and one photo-detector at the interferometer output. The DFB laser is frequency modulated by slight changes of injection current while the interference intensity signal is processed synchronously. Our algorithm quantifies the phase as two sinusoidal waveforms with a phase offset equal to the quarter of the DFB laser wavelength. Besides the computation of these quadrature signals, the scale linearization techniques are used for an additional suppression of optical setup imperfections, noise and the residual amplitude modulation caused by the laser modulation. The stage position is calculated on basis of the DFB laser wavelength and the processed interference phase. To validate the precision and accuracy we have carried out a pilot experimental comparison with a reference interferometer over the 100 mm measurement range. The first tests promise only 2 nm deviation between simplified and the reference interferometer.
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Study of behavior of the refractive index fluctuations to the lenght noise in displacement interferometry
Holá, Miroslava
Nanoscale measurement became one of the key challenges in the field of metrology in last ten years. The international project launched called “Nanotrace” where renowned EU laboratories including the proposer of this project were trying to break the limits of resolution in interferometry. Techniques investigated here have proven that there are chances to achieve significant improvements in resolution of laser interferometry. Measurement of position within a limited range is typical for coordinate measuring system such as nanometrology standards combining scanning probe microscopy (SPM) with precise positioning. In this contribution we evaluate the level of uncertainty associated with spatial shift of two measuring beams and spatial shift of one measuring beam (change of length the measuring beam). Consequently the nature of the fluctuations of the refractive index of air in laser interferometry is investigated anddiscussed with the focus on potential applications in coordinate measuring systems and long-range metrological scanning pro microscopy systems.
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