Original title: Interferometrický odměřovací systém pro elektronový litograf
Translated title: Interferometric measurement system for cost effective e-beam writer
Authors: Řeřucha, Šimon ; Šarbort, Martin ; Lazar, Josef ; Číp, Ondřej
Document type: Papers
Conference/Event: Laser54, Třešť (CZ), 2014-10-29 / 2014-10-31
Year: 2014
Language: cze
Abstract: [cze] [eng]

Keywords: e-beam writer; homodyne detection; laser frequency modulation; laser interferometry; nanometrology; scale linearization; signal processing
Project no.: TE01020233 (CEP), TA03010663 (CEP), TA02010711 (CEP), LO1212 (CEP), ED0017/01/01, EE2.3.30.0054
Funding provider: GA TA ČR, GA TA ČR, GA TA ČR, GA MŠk, GA MŠk, GA MŠk
Host item entry: Sborník příspěvků multioborové konference Laser54, ISBN 978-80-87441-13-8

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0238879

Permalink: http://www.nusl.cz/ntk/nusl-177645


The record appears in these collections:
Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers
 Record created 2014-11-27, last modified 2021-11-24


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