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Characterization of hydrogenated silicon thin films and diode structures with integrated germanium nanoparticles
Stuchlík, J. ; Fajgar, R. ; Remeš, Z. ; Kupčík, Jaroslav ; Stuchlíková, H.
P-I-N diode structures based on the thin films of amorphous hydrogenated silicon (a-Si: H) deposited by Plasma Enhanced Chemical Vapor Deposition (PECVD) technique were prepared with embedded Si and Ge nanoparticles. The Reactive Laser Ablation (RLA) of germanium target was used to cover the intrinsic a-Si: H layer by Ge NPs under a low pressure of the silane. The RLA was performed using focused excimer ArF laser beam under SiH4 background atmosphere. Reaction between ablated Ge NPs and SiH4 led to formation of Ge NPs covered by thin GeSi: H layer. The deposited NPs were covered and stabilized by a-Si: H layer by PECVD. Those two deposition processes were alternated repeatedly. Volt-ampere characteristics of final diode structures were measured in dark and under illumination as well as their electroluminescence spectra.
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Characterization of hydrogenated silicon thin films and diode structures with integrated germanium nanoparticles
Stuchlík, Jiří ; Fajgar, Radek ; Kupčík, Jaroslav ; Remeš, Zdeněk ; Stuchlíková, The-Ha
Substrates with ZnO (or ITO) conductive layers were covered by thin film of a-Si:H deposited by PECVD technique. Under a turbo-molecular vacuum (10-4 Pa) the reactive laser ablation (RLA) was used to cover this a-Si:H thin film by germanium NPs. The RLA was performed using focused excimer ArF laser beam (193 nm, 100 mJ/pulse) under SiH4 background atmosphere (0.5 Pa). As a target the elemental germanium was used. Reaction between ablated Ge and silane led to formation of Ge NPs covered by thin SiGe layer. Then the deposited NPs were covered and stabilized by a-Si:H layer by PECVD. Those two deposition processes was alternated and applied a few times. The Si:H thin films with integrated Ge NPs were characterized by microscopic, spectroscopic and diffraction techniques. I-V characteristics of final diode structures without and under illumination were measured as well as their electroluminescence behaviour.
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Comparative study on functionalization of NCD films with amine groups
Artemenko, Anna ; Kozak, Halyna ; Stuchlík, Jiří ; Biederman, H. ; Kromka, Alexander
Two plasma-based processes for functionalization of oxygen or hydrogen terminated NCD surfaces with amino groups were compared. The first process was based on deposition of thin (8 nm) amine containing plasma polymer by RF magnetron sputtering of Nylon target in Ar/N-2 working gas mixture. RF plasma treatment in NH3 for 10 minutes was used in the second process. The properties of NCD films before and after amination were characterized by scanning electron microscopy (SEM), wettability measurements, spectral ellipsometry, X-ray photoelectron spectroscopy (XPS), Raman spectroscopy, and current-voltage (I-V) measurements. The presence of nitrogen (and thus amino groups) on the surface was confirmed by XPS measurements in both cases. The obtained results indicated that NCD surface functionalization from amine containing plasma polymer by RF magnetron sputtering is an alternative technological solution for successful functionalization of diamond surfaces for biosensor applications.
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The deposition of germanium nanoparticles on hydrogenated amorphous silicon.
Stuchlík, J. ; Volodin, V.A. ; Shklyaev, A.A. ; Stuchlikova, T.H. ; Ledinsky, M. ; Čermák, J. ; Kupčík, Jaroslav ; Fajgar, R. ; Mortet, V. ; More-Chevalier, J. ; Ashcheulov, P. ; Purkrt, A. ; Remeš, Z.
We reveal the mechanism of Ge nanoparticles (NPs) formation on the surface of the hydrogenated amorphous silicon (a-Si:H) deposited by Plasma Enhanced Chemical Vapor Deposition (PECVD) on ITO and a on boron doped nanocrystalline diamond (BDD). The coating of Ge NPs on a-Si:H was performed by molecular beam epitaxy (MBE) at temperatures up to 450 degrees C. The Ge NPs were characterized by Raman spectroscopy, scanning electron microscopy (SEM) and high resolution transmission electron microscopy (HRTEM). The nanocrystalline Ge particles are conglomerates of nanocrystals of size 10-15 nm and quantum dots (QDs) with size below 2 nm embedded in amorphous Ge phase. After coating with Ge NPs the a-Si:H thin films show better adhesion on BDD substrates then on ITO substrates.
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The deposition of germanium nanoparticles on hydrogenated amorphous silicon
Stuchlík, Jiří ; Volodin, V.A. ; Shklyaev, A.A. ; Stuchlíková, The-Ha ; Ledinský, Martin ; Čermák, Jan ; Kupčík, Jaroslav ; Fajgar, Radek ; Mortet, Vincent ; More Chevalier, Joris ; Ashcheulov, Petr ; Purkrt, Adam ; Remeš, Zdeněk
We reveal the mechanism of Ge nanoparticles (NPs) formation on the surface of the hydrogenated amorphous silicon (a-Si:H) deposited by Plasma Enhanced Chemical Vapor Deposition (PECVD) on ITO and a on boron doped nanocrystalline diamond (BDD). The coating of Ge NPs on a-Si:H was performed by molecular beam epitaxy (MBE) at temperatures up to 450 °C. The Ge NPs were characterized by Raman spectroscopy, scanning electron microscopy (SEM) and high resolution transmission electron microscopy (HRTEM). The nanocrystalline Ge particles are conglomerates of nanocrystals of size 10-15 nm and quantum dots (QDs) with size below 2 nm embedded in amorphous Ge phase. After coating with Ge NPs the a-Si:H thin films show better adhesion on BDD substrates then on ITO substrates.
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Hydrogen plasma treatment of ZnO thin films
Chang, Yu-Ying ; Neykova, Neda ; Stuchlík, Jiří ; Purkrt, Adam ; Remeš, Zdeněk
ZnO is an attractive wide band gap semiconductor with large exciton binding energy, high refractive index, high biocompatibility and diversety of nanostructure shapes which makes it suitable for many applications in the optoelectronic devices, optical sensors, and biosensors. We study the effect of hydrogen plasma treatment of the nominally undoped ZnO thin film deposited by DC reactive magnetron sputtering of Zn target in the gas mixture of argon and oxygen plasma. The SEM images show that the crystal size increases with film thickness. We confirm, that the electrical conductivity significantly increases after hydrogen plasma treatment by 4 orders of magnitude. Moreover, the increase of the infrared optical absorption, related to free carrier concentration, was detected below the optical absorption edge by the photothermal deflection spectroscopy.\n
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Strike media at Charles University during the Velvet Revolution 1989
Stuchlík, Jakub ; Cebe, Jan (advisor) ; Bednařík, Petr (referee)
The aim of this thesis is to find all available media published by strike committees at the Charles University and at other universities, to describe them and to compare them with the official daily and each other. Moreover, the publishers of those media should have been contacted with the request for interview. However, after discussion with my supervisor, interviews with publishers and editors were not done, because of complexity and scope of the thesis. The thesis summarizes activities of students during the Velvet Revolution of 1989 and focuses on student newsletters and magazines that were published by student strike committees and other independent student associations during the time of the revolution. Eleven media published in Prague, Pilsen and Olomouc are described. The described magazines are the following ones: Čaje o páté, EM89, Informační bulletin, Nezávislí, Plzeňský student, Proto, Přetlak, Reflex, Růžové právo, Situace 89 and Skoba. In addition, individual journals are compared with each other. Firstly the journals from the Charles University and secondly the other magazines. One subchapter deals with comparison of students' media with the official daily Rudé právo, which was the most read newspaper in Czechoslovakia by that time.
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