Original title: The deposition of amorphous and amorphous hydrogenated silicon with embedded cubic Mg.sub.2./sub.Si nanoparticles
Authors: Stuchlíková, The-Ha ; Stuchlík, Jiří ; Remeš, Zdeněk ; Fajgar, Radek ; Galkin, N.G. ; Galkin, K.N. ; Chernev, I.M.
Document type: Papers
Conference/Event: 5th International Conference Nanocon 2013, Brno (CZ), 20131016
Year: 2014
Language: eng
Abstract: We study possibilities how to increase a by usage of magnesium silicide nanoparticles (Mg2Si-NPs) in structure of Si: H. In this paper we introduce two technics -combination of PECVD and Vacuum Evaporation (VE) and Reactive Laser Ablation (RLA) -for preparation of cubic structure of Mg2Si-NPs in amorphous (a-Si) or amorphous hydrogenated (a-Si: H) silicon matrix. Formation of Mg2Si-NPs was proved by Raman spectroscopy. Likewise we introduce optical changes measured at absorption edge and the first results on realized NIP structures.
Keywords: a-Si/a-Si:H matrix; Mg.sub.2./sub.Si nanoparticles; PECVD; RDA; RLA
Host item entry: NANOCON 2013 - 5th International Conference Proceedings, ISBN 978-80-87294-47-5

Institution: Institute of Physics AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0281141

Permalink: http://www.nusl.cz/ntk/nusl-371570

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Research > Institutes ASCR > Institute of Physics
Conference materials > Papers
 Record created 2018-03-07, last modified 2021-11-24

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