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Measurement of mechanical properties of thin films by nanocompression
Kuběna, Ivo ; Kruml, Tomáš ; Hutař, Pavel ; Boháč, Petr ; Stranyánek, Martin ; Čtvrtlík, Radim ; Pánek, P. ; Vystavěl, T.
Mechanical properties of thin films are not easy to be measured. This is particularly true in the case of plastic properties as the yield point, the work hardening rate or the ultimate stress. Nevertheless, such parameters are needed e.g. in the design of integrated circuits where the thermal stresses may lead to mechanical failure of the component. We applied two modern experimental facilities, the focused ion beam and the nanoindentation for exact measurement of plastic properties of a Al-1.5%Cu thin film prepared by PVD, used for electrical connection of integrated circuits. By FIB milling, cylindrical specimens were prepared. The height of the specimens was equal to the film thickness (2 m) and their diameter was about 1.3 m. These specimens were subjected to the compressive loading using the nanoindenter equipped by a flat punch. Stress-strain curves of the film were obtained rather precisely.
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Měření tvrdosti nehomogenních plazmových nástřiků
Čtvrtlík, Radim ; Stranyánek, Martin ; Boháč, Petr ; Jastrabík, Lubomír ; Hrabovský, Milan ; Ctibor, Pavel
Paper deals with testing of mechanical properties of plasma sprayed coatings TiO2 by Depth Sensing Indentation performed on measuring system NanoTest 600™. The NT600™ is a modular measuring instrument with unique design, which applies the loading force in horizontal direction. The platform can measure and evaluate hardness, elastic modulus, adhesion, wear, fracture and also dynamic properties. In the last years the new plasma spraying technology of ceramic and ceramic-metal materials has became as very convenient technique in many industrial and reconstruction processes. The investigated samples of plasma sprayed coatings were prepared in Institute of Plasma Physics of the Academy of Sciences of the Czech Republic. The goal of this paper is to contribute to deepening the knowledge in local distribution of mechanical properties in plasma sprayed coatings, especially of hardness and elastic modulus.
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