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Pulsed linear antenna microwave plasma – a step ahead in large area material depositions and surface functionalization
Kromka, Alexander ; Babchenko, Oleg ; Ižák, Tibor ; Potocký, Štěpán ; Davydova, Marina ; Neykova, Neda ; Kozak, Halyna ; Remeš, Zdeněk ; Hruška, Karel ; Rezek, Bohuslav
A technological progress in the large area growth of diamond films and carbon nanotubes by the modified linear antenna MW system is presented. We show a correlation between process parameters and nano- or poly-crystalline film character. A challenging part, diamond coated mirrors or ATR prisms, are shown as multifunctional optical elements suitable for detection of absorbed molecules. Additional positive feature of the presented plasma system is low temperature hydrogen functionalization of diamond films. Finally, we present that combination of pulsed MW plasma with radiofrequency substrate biasing results in growth of oriented CNTs over large area.
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Diamond growth on silicon and WC-Co by microwave plasma chemical vapor deposition
Frgala, Z. ; Kudrle, V. ; Janča, J. ; Buršíková, V. ; Vašina, P. ; Meško, M. ; Buršík, Jiří ; Kadlečíková, M. ; Klapetek, P.
We studied the growth of microcrystalline diamond films on pre-treated Si and WC-Co substrates by microwave plasma chemical vapor deposition.We observed the interesting time dependence of the negative bias voltage during nucleation stage which is useful for nucleation process monitoring. The layers were analysed by Raman spectroscopy, scanning electron microscopy and atomic force microscopy.
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