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Detection of Signal Electrons in High Pressure Conditions in Environmental Scanning Electron Microscopy
Neděla, Vilém ; Jirák, Josef (advisor)
The thesis deals with the study of properties of a new system for detection of true secondary and backscattered electrons in high pressure conditions of the specimen chamber of a newly built environmental scanning electron microscope AQUASEM II. Detection system contains three detectors. For the first time is introduced and analyzed the working principle of ionisation detector with electrostatic separator, which is in many experiments compared with ionisation detector of secondary electrons. Experimentally demonstrated are unique properties of this detection system, especially the ability of energy separation of detected signal electrons. For the various working conditions are also analyzed signal levels detected by the BSE YAG detector, which is designed as a part of the new detection system and which worked together with both ionisation detectors.
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Multi-electrode system of ionization detector for environmental scanning electrone microscope
Uhlář, Vít ; Špinka, Jiří (referee) ; Jirák, Josef (advisor)
Thesis deals with environmental scanning electron microscopy and with detection of signal electrons by using ionization detector. First part talks about the principle of environmental scanning electron microscope. Second part describes signals generated by interaction of primary electron beam with sample. Third section explains the principle of impact ionization and ionization detector. Experimental part deals with usage of segmental ionization detector and with measuring of signal amplification from copper and platinum. Thesis also examines arrangement of electrodes of ionisation detector on material contrast and examines also on influence of voltage contrast on base - emitter junction of an NPN bipolar transistor. All experiments were carried out in dependency on saturated water vapour pressure in sample chamber.
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The effect of the shape of the intake ports for pumping in a Scintillation detector.
Flídr, Karel ; Vyroubal, Petr (referee) ; Maxa, Jiří (advisor)
The thesis is concerned with the design of the shape of suction canals used for pumping in the scintillation detector. The goal is to perform analysis of the model of the detector according to the current conception and then perform an optimalisation of the suction canals as per demands to their function. In the beginning of the thesis the history of the microscope and electron microscopy is described. The next chapter is focused on a more detailed description of ESEM. The following charter is dedicated to describing the scintillation detector.The thesis recounts the kinds of liquid flow. In conclusion the programs SolidWorks and Ansys Fleunt are described. Next part of this thesis describes in detail parameters‘ settings of simulation calculation. Following chapter introduces designed changes of suction channels shape and its results are shown and described.
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Multi-electrode system of ionization detector for environmental scanning electrone microscope
Uhlář, Vít ; Špinka, Jiří (referee) ; Jirák, Josef (advisor)
Thesis deals with environmental scanning electron microscopy and with detection of signal electrons by using ionization detector. First part talks about the principle of environmental scanning electron microscope. Second part describes signals generated by interaction of primary electron beam with sample. Third section explains the principle of impact ionization and ionization detector. Experimental part deals with usage of segmental ionization detector and with measuring of signal amplification from copper and platinum. Thesis also examines arrangement of electrodes of ionisation detector on material contrast and examines also on influence of voltage contrast on base - emitter junction of an NPN bipolar transistor. All experiments were carried out in dependency on saturated water vapour pressure in sample chamber.
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Ionization detector for ESEM
Pokluda, Tomáš ; Špinka, Jiří (referee) ; Jirák, Josef (advisor)
This thesis is focused on the environmental scanning electron microscopes including a description of the basic physical mechanisms. It describes the design and realization of the electrode ionization detector system suitable for the detection of signal electrons with a greater proportion of secondary electrons. It also deals with simulations of trajectories of electrons in the electrostatic field of the detector, and with verification of the functionality of the detector in the environment of water vapors in the specimen chamber of the electron microscope.
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Using Cosmos FloWorks for analyse the detector.
Hladík, Jaroslav ; Špinka, Jiří (referee) ; Maxa, Jiří (advisor)
This work follow up gas fluxion problems in detector chamber of enviromental scanning electron microscope. Describes basic electron microscopes characteristic and evaluation output signal. Basic focus of this work is proposal placing screening in detector in surroundings programme SolidWorks 2008. There is by the help of system COSMOS FloWorks effected analysis pumping gas with different pressure and mutual position which has significant influence in given fluxion conditions. Programmatic surroundings makes it possible to simulation 3D and evaluation fluxion method final capacities by setting fundamental conditions of solving, which would have been next to real behaviour of gas in real detector.
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Using Cosmos FloWorks for analyse the detector.
Bordovský, Petr ; Špinka, Jiří (referee) ; Maxa, Jiří (advisor)
This work deal with the analysis of influence of pressure‘s sizes in vacuum chamber of specimen Evironmental Scanning Electron Microscope and the influence of sizes of aperture diaphragm by scintillation detector. The analysis proceeds in detector of secondary electrons. The detector is modelled by system 3D CAD SolidWorks with the help of system CAE Cosmos FloWorks.
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Scintillation SE Detector for Variable Pressure SEM
Tihlaříková, Eva ; Neděla, Vilém (referee) ; Jirák, Josef (advisor)
This project deals with the theme of environmental scanning electron microscopy (EREM). This method allows the examination of insulators and wet specimens without pretreatment and modification like drying and metallization. The principle of this method consists in using higher pressure in a specimen chamber. The pressure is within the range of 100 – 200 Pa. However, the pressure in the specimen chamber restricts the signal detection interference. The objective of the work is to explore the possibility of interference in secondary electron route detection by way of electrostatic field. The electrostatic field was realized with the system consisting of four electrodes located in front of the scintillation detector. It should have interfered the secondary electron´s trajectory to the detector chamber. The optimization of voltage on the electrodes was made by simulation program called SIMION. The simulation results were experimentally verified with laboratory EREM.
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