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Submicron Structures with Deep Relief — Technology of Preparation
Matějka, Milan ; Kuřitka,, Ivo (referee) ; Mgr. Petr Klapetek Ph.D (referee) ; Kolařík, Vladimír (advisor)
The dissertation thesis is focused on research and development in the field of microfabrication by the technology of electron beam lithography. In the first part of this work, the extensive study is conducted in the field of technology of electron beam lithography in terms of physical principles, writing strategies and resist materials. This is followed with description of physical principles of etching for the transfer of relief structures into substrates. The thesis describes innovative techniques in modelling, simulation, data preparation and optimization of manufacturing technology. It brings new possibilities to record deep binary or multilevel microstructures using electron beam lithography, plasma and reactive ion etching technology. Experience and knowledge in the large area of microlithography, plasma and anisotropic wet-etching of silicon have been capitalized to the design process of manufacturing of nano-patterned membranes. It was followed with practical verification and optimization of the microfabrication process.
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ECG data recorder
Hruškovský, Antonín ; Krajsa, Ondřej (referee) ; Burda, Karel (advisor)
The master thesis deals with the issue of long-term ECG recording, used in medicine for monitoring of cardiac anomalies. Author focuses on explaning the general concepts in the first part. Author describes measuring methods and issues associated with measuring. Comparison of existing devices and design of solution with own features are in next chapter. Next is comparison and selecting of formats for recording measured data and description of device connectivity. In next chapter author focuses on hardware design and implementation of device. After that author describes software solution design for microcontroller, Bluetooth module and smartphone. Author introduces possible improvements for future generation of the device and then describes results of testing at the end of this work.
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MEMS microhotplate platform for chemical sensors
Vančík, Silvester ; Svatoš, Vojtěch (referee) ; Prášek, Jan (advisor)
This master’s thesis deals with design and fabrication of MEMS microhotplate platform for chemical gas sensors. The theoretical part describes MEMS, sensors and processes and technologies needed for fabrication of micro hotplate. The practical part includes simulations, masks and step by step microhotplate fabrication. Fabricated heating membrane was characterized and compared to theoretical values from simulations and to similar devices presented in literature.
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Cavitation in microfluidics
Holub, Martin ; Kozák, Jiří (referee) ; Rudolf, Pavel (advisor)
Mikrofluidice byla v posledních letech věnována intenzivní pozornost výzkumnými týmy takřka po celém světě. Její možné aplikace jsou velmi početné, zejména pak v oblasti zdravotnictví, ukládání energie do baterií nebo chlazení vysoce výkonných počítačů. Bakalářská práce „Kavitace v mikrofluidice“ se zabývá kavitací na mikro-měřítku. Nedávný výzkum ukazuje, že mnohé charakteristiky kavitujícího proudění na takto malých rozměrech se podstatně liší oproti charakteristikám pozorovaným na konvenčních makro-rozměrech. Toto podtrhuje relevantnost této práce. Lepší pochopení tohoto jevu může být využito například k řešení jednoho ze značných úskalí mikrofluidiky a to sice mísení tekutin, nebo dále také k jejich pumpování. Mezi další možné aplikace se řadí mechanické namáhání a rozklad mikroorganismů a buněk, katalýza chemických reakcí a cílená doprava léčiv. První část této práce je věnována postupně základům z oblasti mechaniky tekutin a chemie kavitace. Tato část je následována stručným přehledem aplikací kavitace a to jak na měřítkách tradičních, tak na měřítkách v řádech mikrometrů. Poté je uveden popis numerického řešení kavitujícího proudění spolu s analýzou a ověřením získaných výsledků. Mezi výsledky je například popis rozložení fází, informace o tom, kde dochází k recirkulaci a také přehled vlivu změny kavitačního čísla na tvar a charakteristiky proudění. V závěrečné části práce je pak na základě získaných znalostí navržen experiment, který umožní dále studovat tuto problematiku a poslouží také k vyhodnocení vhodnosti laminárního modelu. Tato bakalářská práce slouží jako základní kámen pro další výzkum v této oblasti plánovaný na Vysokém učením technickém v Brně, a z tohoto důvodu jsou v textu uvedena doporučení pro další práci.
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Digital signal processing from MEMS microphones
Koníček, Cyril ; Pristach, Marián (referee) ; Fujcik, Lukáš (advisor)
Proposed bachelor thesis is focused to the filter design for digital signal processing from digital microphone (MEMS type). The microphone types, structure of AMDP421 digital microphone and digital filter types are described in details. Selected filters are modelled, designed and simulated in MATLAB tool to meet the filter specification. The results are sufficiently commented and assessed. Afterwards the digital filters are described in VHDL language and implemented to the target FPGA circuit. In frame of the work the extended modules to SPARTAN 3 STARTER KIT are developed and designed to evaluate and demonstrate the proper function of the proposed filter design.
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Measurement of noise characteristics of MEMS accelerometers
Mihaľko, Juraj ; Klusáček, Stanislav (referee) ; Beneš, Petr (advisor)
The aim of this bachelor`s thesis was to determine noise static parameters of MEMS accelerometers. It is a limiting parameter for the activity with them. If the manufacturer gives the values of MEMS accelerometers noise compare them with measured values. The work contains comparison the noise of cards and determines which is better suited to measuring chain for measuring noise. Noise of the MEMS accelerometers was measured in static mode. Next step was to propose measurement setup for evaluation noise parameters of MEMS accelerometers in dynamic mode. For evaluation noise in dynamic mode was used new card. The possibility of using this measurement setup was verified. In dynamic mode were noise of three MEMS accelerometers in axis Z measured and one three-axis accelerometer in all three axis.
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Laboral task of variables measurement by position MEMS sensor
Jarůšek, Jakub ; Vančík, Silvester (referee) ; Hubálek, Jaromír (advisor)
MEMS technology and her products are very used today. One of these products are accelerometers, which are highly used for determining orientation, wear measurement or seismology. Their functions are used for consumer electronics, even for development or diagnostics. For more demanding applications, especially for determining orientation, are used components named gyroscopes (alone or with cooperation with accelerometers).
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Inertial Navigation Unit
Kulka, Branislav ; Kříž, Vlastimil (referee) ; Šolc, František (advisor)
This thesis is concerned with attitude estimation of small flying robots using low cost, small-sized inertial and magnetic sensors. A quaternion-based extended Kalman filter is used, which adaptively compensates external acceleration. External acceleration is the main source of estimation error. If external acceleration is detected, the accelerometer measurement covariance matrix of the Kalman filter is adjusted. The proposed algorithms are verified through experiments. Selected algorithm is implemented on STM32F4DISCOVERY development board.
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Verastile Sensor-based Experimental Platform
Tydor, Maximilián ; Ing. Vladimír Hubík, Ph.D. (Saab Czech s.r.o.) (referee) ; Šebesta, Jiří (advisor)
This document deals with issues of testing semiconductor inertial sensors like gyroscopes and accelerometers, but also other sensors like magnetometers, inclinometers and others for aviation navigation purposes where strict requirements cover every system. The goal of this thesis is to create modular test platform for testing wide variety of sensors in different combinations under variable circumstances. The development covers mechanical design, electrical design – hardware and also control algorithm – software.
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