Název:
Pulsed linear antenna microwave plasma – a step ahead in large area material depositions and surface functionalization
Autoři:
Kromka, Alexander ; Babchenko, Oleg ; Ižák, Tibor ; Potocký, Štěpán ; Davydova, Marina ; Neykova, Neda ; Kozak, Halyna ; Remeš, Zdeněk ; Hruška, Karel ; Rezek, Bohuslav Typ dokumentu: Příspěvky z konference Konference/Akce: NANOCON 2011. International Conference /3./, Brno (CZ), 2011-09-21 / 2011-09-23
Rok:
2011
Jazyk:
eng
Abstrakt: A technological progress in the large area growth of diamond films and carbon nanotubes by the modified linear antenna MW system is presented. We show a correlation between process parameters and nano- or poly-crystalline film character. A challenging part, diamond coated mirrors or ATR prisms, are shown as multifunctional optical elements suitable for detection of absorbed molecules. Additional positive feature of the presented plasma system is low temperature hydrogen functionalization of diamond films. Finally, we present that combination of pulsed MW plasma with radiofrequency substrate biasing results in growth of oriented CNTs over large area.
Klíčová slova:
CNT; CVD deposition; diamond; graphene; microwave plasma Číslo projektu: CEZ:AV0Z10100521 (CEP), GAP108/11/0794 (CEP), MEB0810082 (CEP), KAN400100701 (CEP), IAAX00100902 (CEP) Poskytovatel projektu: GA ČR, GA MŠk, GA AV ČR, GA AV ČR Zdrojový dokument: NANOCON 2011. Conference proceedings, ISBN 978-80-87294-27-7
Instituce: Fyzikální ústav AV ČR
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Informace o dostupnosti dokumentu:
Dokument je dostupný v příslušném ústavu Akademie věd ČR. Původní záznam: http://hdl.handle.net/11104/0207655