Název:
Mechanical properties of Al thin films measured by microcompression
Autoři:
Kuběna, Ivo ; Kruml, Tomáš Typ dokumentu: Příspěvky z konference Konference/Akce: Applied Mechanics 2011, Velké Bílovice (CZ), 2011-04-18 / 2011-04-20
Rok:
2011
Jazyk:
eng
Abstrakt: Two modern experimental techniques, the focused ion beam milling and the nanoindentation, were applied in order to measure exactly plastic properties of a Al-1.5%Cu thin film prepared by the physical vapour deposition, used for electrical connection of integrated circuits. By focused ion beam milling, cylindrical specimens were prepared. The height of the specimens was equal to the film thickness (2 micrometers) and their diameter was about 1.3 micrometers. These specimens were subjected to the compressive loading using the nanoindenter equipped by a flat punch. It is possible to obtain stress-strain curves of the thin film rather precisely.
Klíčová slova:
Al thin film; focused ion beam; nanoindenter; pillars Číslo projektu: CEZ:AV0Z20410507 (CEP) Zdrojový dokument: Applied Mechanics 2011, ISBN 978-80-87434-03-1
Instituce: Ústav fyziky materiálů AV ČR
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Informace o dostupnosti dokumentu:
Dokument je dostupný v příslušném ústavu Akademie věd ČR. Původní záznam: http://hdl.handle.net/11104/0203208