Original title: Mechanical properties of Al thin films measured by microcompression
Authors: Kuběna, Ivo ; Kruml, Tomáš
Document type: Papers
Conference/Event: Applied Mechanics 2011, Velké Bílovice (CZ), 2011-04-18 / 2011-04-20
Year: 2011
Language: eng
Abstract: Two modern experimental techniques, the focused ion beam milling and the nanoindentation, were applied in order to measure exactly plastic properties of a Al-1.5%Cu thin film prepared by the physical vapour deposition, used for electrical connection of integrated circuits. By focused ion beam milling, cylindrical specimens were prepared. The height of the specimens was equal to the film thickness (2 micrometers) and their diameter was about 1.3 micrometers. These specimens were subjected to the compressive loading using the nanoindenter equipped by a flat punch. It is possible to obtain stress-strain curves of the thin film rather precisely.
Keywords: Al thin film; focused ion beam; nanoindenter; pillars
Project no.: CEZ:AV0Z20410507 (CEP)
Host item entry: Applied Mechanics 2011, ISBN 978-80-87434-03-1

Institution: Institute of Physics of Materials AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0203208

Permalink: http://www.nusl.cz/ntk/nusl-80776


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