Original title: Growth and properties of diamond films prepared on 4-inch substrates by cavity plasma systems
Authors: Babčenko, Oleg ; Potocký, Štěpán ; Aubrechtová Dragounová, Kateřina ; Szabó, Ondrej ; Bergonzo, P. ; Rezek, B. ; Kromka, Alexander
Document type: Papers
Conference/Event: International Conference NANOCON 2020 /12./, Brno (CZ), 20201021
Year: 2021
Language: eng
Abstract: We compare two microwave (2.45 GHz) plasma systems with ellipsoidal and multimode clamshell cavity for diamond synthesis by chemical vapor deposition. We use H2/CH4/CO2 gas mixture for diamond film deposition on Si <100> wafers. Both systems are capable of high pressure (up to 20 kPa) operation and high growth rates (several µm/h). We compare the cavity systems from the point of diamond quality (Raman shift measurement), substrate size (2” versus 4”) and grown film homogeneity together with surface morphology (SEM), deposition rate and parasitic doping levels (photoluminescence).
Keywords: high-power density plasma; large area diamond; microwave cavity plasma
Project no.: CZ.02.1.01/0.0/0.0/16_019/0000760, EF16_019/0000760, LM2018110 (CEP)
Funding provider: OP VVV - SOLID21, GA MŠk, GA MŠk
Host item entry: Proceedings 12th International Conference on Nanomaterials - Research & Application - Nanocon 2020, ISBN 978-80-87294-98-7, ISSN 2694-930X

Institution: Institute of Physics AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0319855

Permalink: http://www.nusl.cz/ntk/nusl-438875


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