Original title: Comparison of techniques for diffraction grating topography analysis
Authors: Matějka, Milan ; Rek, Antonín ; Mika, Filip ; Fořt, Tomáš ; Matějková, Jiřina
Document type: Papers
Conference/Event: International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /12./, Skalský dvůr (CZ), 2010-05-31 / 2010-06-04
Year: 2010
Language: eng
Abstract: There are a wide range of analytical techniques which may be used for surface structure characterization. For high resolution surface investigations, two commonly used techniques are Atomic Force Microscopy (AFM) and Scanning Electron Microscopy (SEM). Both techniques are capable resolve surface structure down to the nanometer in scale. However the mechanism of topography imaging and type of information acquired is different.
Keywords: AEM; Atomic Force Microscopy; Scanning Electron Microscopy; SEM; topography imaging
Project no.: CEZ:AV0Z20650511 (CEP)
Host item entry: Proceedings of the 12th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, ISBN 978-80-254-6842-5

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0190602

Permalink: http://www.nusl.cz/ntk/nusl-41923


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers