Original title: Differentially Pumped Chamber of VP-SEM Computed by the Use of Cosmos FloWorks Software
Translated title: Diferenciálně čerpaná komora EREM počítaná pomocí softwaru Cosmos
Authors: Maxa, J. ; Neděla, Vilém
Document type: Papers
Conference/Event: Engineering Mechanics 2008, Svratka (CZ), 2008-05-12 / 2008-05-15
Year: 2008
Language: eng
Abstract: [eng] [cze]
The article analyses and compares the result of air pumping measurement for selected shapes of differentially pumped chamber to create vacuum, using The Cosmos FloWorks system. Článek analyzuje a porovnává výsledky měření čerpací rychlosti vzduchu pro vybrané tvary diferenciálně čerpané komory vzorku pomocí softwaru Cosmos FloWorks.
Keywords: Cosmos FloWorks; gas flow; VP SEM
Project no.: CEZ:AV0Z20650511 (CEP), KJB200650602 (CEP)
Funding provider: GA AV ČR
Host item entry: Engineering Mechanics 2008, ISBN 978-80-87012-11-6

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0165401

Permalink: http://www.nusl.cz/ntk/nusl-39407


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers