Original title:
Differentially Pumped Chamber of VP-SEM Computed by the Use of Cosmos FloWorks Software
Translated title:
Diferenciálně čerpaná komora EREM počítaná pomocí softwaru Cosmos
Authors:
Maxa, J. ; Neděla, Vilém Document type: Papers Conference/Event: Engineering Mechanics 2008, Svratka (CZ), 2008-05-12 / 2008-05-15
Year:
2008
Language:
eng Abstract:
[eng][cze] The article analyses and compares the result of air pumping measurement for selected shapes of differentially pumped chamber to create vacuum, using The Cosmos FloWorks system. Článek analyzuje a porovnává výsledky měření čerpací rychlosti vzduchu pro vybrané tvary diferenciálně čerpané komory vzorku pomocí softwaru Cosmos FloWorks.
Keywords:
Cosmos FloWorks; gas flow; VP SEM Project no.: CEZ:AV0Z20650511 (CEP), KJB200650602 (CEP) Funding provider: GA AV ČR Host item entry: Engineering Mechanics 2008, ISBN 978-80-87012-11-6
Institution: Institute of Scientific Instruments AS ČR
(web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences. Original record: http://hdl.handle.net/11104/0165401