Original title:
Using Cosmos FloWorks to Design the Differentially Pumped Chamber
Translated title:
Using Cosmos FloWorks to Design the Differentially Pumped Chamber
Authors:
Maxa, J. ; Neděla, Vilém Document type: Papers Conference/Event: Engineering Mechanics 2008, Svratka (CZ), 2008-05-12 / 2008-05-15
Year:
2008
Language:
eng Abstract:
[eng][cze] Environmental scanning electron microscope creates new possibilities in the field of examination various types of specimens and their phases. Using Cosmos FloWorks to design the differentially pumped chamber enable make optimal shape of this chamber, which is very important for god function of VP-SEM.EREM vytváří nové možnosti v oblasti zkoumání různých typů vzorků a jejich fází. Využití Cosmos FloWorks k návrhu diferenciálně čerpané komory dovoluje vytvořit optimální tvar této komory, což je velmi důležité pro správnou funkci EREM.
Keywords:
Cosmos FloWorks; VP-SEM Project no.: CEZ:AV0Z20650511 (CEP), KJB200650602 (CEP) Funding provider: GA AV ČR Host item entry: Engineering Mechanics 2008, ISBN 978-80-87012-11-6
Institution: Institute of Scientific Instruments AS ČR
(web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences. Original record: http://hdl.handle.net/11104/0165400