Název:
Controlled structuring of self-assembled polystyrene microsphere arrays by two different plasma systems
Autoři:
Domonkos, Mária ; Ižák, Tibor ; Stolcova, L. ; Proška, J. ; Kromka, Alexander Typ dokumentu: Příspěvky z konference Konference/Akce: 5th International Conference Nanocon 2013, Brno (CZ), 20131016
Rok:
2014
Jazyk:
eng
Abstrakt: In this study we present a successful manipulation of microspheres by reactive ion etching (RIE). A self-assembled monolayer close-packed array of monodisperse polystyrene microspheres (PM) with diameter of 471 nm was used as the primary template. The PM templates were processed in two different RIE systems: (i) capacitively coupled radiofrequency plasma (CCP) and (ii) dual plasma system which combines CCP and pulsed linear-antenna microwave plasma (PLAMWP). The influence of process conditions on the PM geometry was systematically studied by scanning electron microscopy (SEM). It was found out that choosing optimal parameters results in a tunable diameter of PM with various shapes (from spheres to pyramid-like structures) while keeping their periodic hexagonal ordering.
Klíčová slova:
Langmuir-Blodgett monolayers; nanosphere lithography; polystyrene microspheres; pulsed linear-antenna microwave plasma; reactive ion etching Číslo projektu: GAP108/12/0910 (CEP) Poskytovatel projektu: GA ČR Zdrojový dokument: NANOCON 2013 - 5th International Conference Proceedings, ISBN 978-80-87294-47-5
Instituce: Fyzikální ústav AV ČR
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Informace o dostupnosti dokumentu:
Dokument je dostupný v příslušném ústavu Akademie věd ČR. Původní záznam: http://hdl.handle.net/11104/0281147