Original title: Computation and design of the improved version of the scintillation secondary electron detector for environmental SEM
Translated title: Výpočet a návrh zlepšené verze scintilačního detektoru sekundárních elektronů pro EREM
Authors: Linhart, Jan ; Neděla, Vilém
Document type: Papers
Conference/Event: Elektrotechnika a informatika /7./, Nečtiny (CZ), 2006-11-01 / 2006-11-02
Year: 2006
Language: cze
Abstract: [cze] [cze]
Článek popisuje nově realizovanou a optimalizovanou verzi scintilačního detektoru sekundárních elektronů (SE) pro environmentání elektronovou mikroskopii. This paper deals with a newly realized and optimized scintillation-type secondary electron (SE) detector for the environmental scanning electron microscope (environmental SEM). Some computations, design and first results concerning the optimized version are described.
Keywords: environmental scanning electron microscopy; scintillation detector; secondary electron
Project no.: CEZ:AV0Z20650511 (CEP)
Host item entry: 7. ročník přehlídky doktorských prací - Elektrotechnika a informatika 2006 (1. Elektrotechnika), ISBN 80-7043-474-0

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0141636

Permalink: http://www.nusl.cz/ntk/nusl-36489


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers