Home > Conference materials > Papers > Computation and design of the improved version of the scintillation secondary electron detector for environmental SEM
Original title:
Computation and design of the improved version of the scintillation secondary electron detector for environmental SEM
Translated title:
Výpočet a návrh zlepšené verze scintilačního detektoru sekundárních elektronů pro EREM
Authors:
Linhart, Jan ; Neděla, Vilém Document type: Papers Conference/Event: Elektrotechnika a informatika /7./, Nečtiny (CZ), 2006-11-01 / 2006-11-02
Year:
2006
Language:
cze Abstract:
[cze][cze] Článek popisuje nově realizovanou a optimalizovanou verzi scintilačního detektoru sekundárních elektronů (SE) pro environmentání elektronovou mikroskopii.This paper deals with a newly realized and optimized scintillation-type secondary electron (SE) detector for the environmental scanning electron microscope (environmental SEM). Some computations, design and first results concerning the optimized version are described.
Keywords:
environmental scanning electron microscopy; scintillation detector; secondary electron Project no.: CEZ:AV0Z20650511 (CEP) Host item entry: 7. ročník přehlídky doktorských prací - Elektrotechnika a informatika 2006 (1. Elektrotechnika), ISBN 80-7043-474-0
Institution: Institute of Scientific Instruments AS ČR
(web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences. Original record: http://hdl.handle.net/11104/0141636