Original title: Dispersion and detection of signal electrons in environmental SEM
Authors: Romanovský, V. ; Neděla, Vilém ; Hutař, O.
Document type: Papers
Conference/Event: Recent trends in charged particle optics and surface physics instrumentation, Skalský dvůr (CZ), 2002-07-08 / 2002-07-12
Year: 2002
Language: eng
Abstract: The environmental scanning microscope is based on convenient adaptation of classical SEM employing the focused primary electron beam. For the proper function of the electron gun the pressure in this part of the microscopemust be less than 10.sup.-3./sup. Pa. The working pressure in the specimen chamber in environmental microscope reaches the order of hundreds of Pa.Therefore, the effective vacuum separation of these two parts is necessary. This can be obtained by the use of two or more apertures limiting the gas flow. It is also necessary to evacuate the space between the apertures by a vacuum pump of a high pumping speed. The increasing of pressure in the specimen chamber brings some difficulties, especially the dispersion of signal electrons by the influence of interaction with the gaseous environment.
Keywords: electron beam; environmental scanning microscope; vacuum pump
Project no.: CEZ:AV0Z2065902 (CEP), IBS2065107 (CEP)
Funding provider: GA AV ČR
Host item entry: Proceedings of the 8.sup.th./sup. international seminar, held in Skalský dvůr, ISBN 80-238-8986-9

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0101125

Permalink: http://www.nusl.cz/ntk/nusl-29558


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