Original title: Combined detector for BSE, SE and BSE+SE detection in a low voltage SEM
Authors: Autrata, Rudolf ; Jirák, Josef ; Romanovský, Vladimír ; Špinka, Jiří
Document type: Papers
Conference/Event: Recent trends in charged particle optics and surface physics instrumentation, Skalský dvůr (CZ), 2002-07-08 / 2002-07-12
Year: 2002
Language: eng
Abstract: Specimen observation at a low accelerating voltage of the electron beam (around 1kV) is a new and attractive technique of scanning electron microscopy. While detection to the signal of secondary electrons (SE) with the help of the scintillation-photomultiplier system described by Everhart-Thornley does not depend on the primary beam energy, the detection of backscattered electrons (BSE), having their energy only a bit lower than energy of the beam, is limited by a low sensitivity of semiconductor or channel plate detectors to channel plate detectors to electrons of energy below 2 keV.
Keywords: electrons beam; Everhart-Thornley; low accelerating voltage
Project no.: CEZ:AV0Z2065902 (CEP), GA102/01/1271 (CEP)
Funding provider: GA ČR
Host item entry: Proceedings of the 8.sup.th./sup. international seminar, held in Skalský dvůr, ISBN 80-238-8986-9

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0101121

Permalink: http://www.nusl.cz/ntk/nusl-29554


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers