Original title: Computer controlled SEM Tesla BS 350 with cathode for detection of slow and Auger electrons
Authors: Hrnčiřík, Petr
Document type: Papers
Conference/Event: CSEM, Vranovská Ves (CZ), 2002-02-08 / 2002-02-09
Year: 2002
Language: eng
Abstract: The goal of the experiment is an in-situ comparison of the signals given by Auger and by slow electrons (down to 10 eV) with a high resolution. These open new possibilities of getting information about the material and topographical contrast from real surfaces. A new experimental device was designed for this intention, which is presented in this contribution.
Keywords: in-situ comparison of the signals; slow electrons
Project no.: CEZ:AV0Z2065902 (CEP)
Host item entry: Proceedings of the 2nd annual meeting of the Czechoslovak microscopy society, ISBN 80-238-8749-1

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0101098

Permalink: http://www.nusl.cz/ntk/nusl-29536


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers