Original title: Recent trends in low voltage scanning electron microscopy for the imaging of semiconductor devices
Authors: Hutař, Otakar ; Müllerová, Ilona ; Romanovský, Vladimír ; Zobačová, Jitka
Document type: Papers
Conference/Event: EMAS 2000 - Regional Workshop on Electron Probe Microanalysis Today /4./, Třešť (CZ), 2000-05-17 / 2000-05-20
Year: 2000
Language: eng
Abstract: The technology of semiconductor devices microfabrication becomes presently the main consumer of imaging methods by means of low voltage scanning electron microscopy (LVSEM). The main tasks are the inspection after lithograophic masking and etching processes, including measurements of critical linewidth dimension (CD), and the imaging of three dimensional high aspect ratio structures.
Project no.: CEZ:AV0Z2065902 (CEP), IAA1065901 (CEP)
Funding provider: GA AV ČR
Host item entry: Proceedings EMAS 2000 - 4th Regional Workshop on Electron Probe Microanalysis Today - Practical Aspects, ISBN 80-01-02176-9
Note: Související webová stránka: mailto:ota@isibrno.cz

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0100887

Permalink: http://www.nusl.cz/ntk/nusl-29484


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers