Original title: Use systems for the analysis of gas flow
Authors: Maxa, J. ; Neděla, Vilém ; Hladká, K. ; Vyroubal, P. ; Vaculík, S. ; Hlavatá, P.
Document type: Papers
Conference/Event: Workshop of Interesting Topics of SEM and ESEM, Mikulov (CZ), 2014-08-26 / 2014-08-31
Year: 2014
Language: eng
Abstract: Environmental scanning electron microscope is explaining withdrawing of two differentially pumped chambers in a drawing area. To solve this problem is used finite volume method. This method includes several steps: - With using of mesh the area is dividing into discrete volume. - Discretization and balancing of the unknown quantities in each finite volume - Numerical solution of discretized equations.
Keywords: ESEM; finite volume method
Project no.: EE.2.3.20.0103
Funding provider: GA MŠk
Host item entry: Workshop of Interesting Topics of SEM and ESEM, ISBN 978-80-87441-12-1

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0238654

Permalink: http://www.nusl.cz/ntk/nusl-177567


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers