Original title:
Use systems for the analysis of gas flow
Authors:
Maxa, J. ; Neděla, Vilém ; Hladká, K. ; Vyroubal, P. ; Vaculík, S. ; Hlavatá, P. Document type: Papers Conference/Event: Workshop of Interesting Topics of SEM and ESEM, Mikulov (CZ), 2014-08-26 / 2014-08-31
Year:
2014
Language:
eng Abstract:
Environmental scanning electron microscope is explaining withdrawing of two differentially pumped chambers in a drawing area. To solve this problem is used finite volume method. This method includes several steps: - With using of mesh the area is dividing into discrete volume. - Discretization and balancing of the unknown quantities in each finite volume - Numerical solution of discretized equations.
Keywords:
ESEM; finite volume method Project no.: EE.2.3.20.0103 Funding provider: GA MŠk Host item entry: Workshop of Interesting Topics of SEM and ESEM, ISBN 978-80-87441-12-1
Institution: Institute of Scientific Instruments AS ČR
(web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences. Original record: http://hdl.handle.net/11104/0238654