Original title: Estimation of mechanical properties of thin Al surface layer
Authors: Petráčková, Klára ; Kuběna, Ivo ; Truhlář, Michal ; Náhlík, Luboš ; Kruml, Tomáš
Document type: Papers
Conference/Event: Applied Mechanics 2012, Plzeň (CZ), 2012-04-16 / 2012-04-18
Year: 2012
Language: eng
Abstract: The paper describes a new method for testing of thin layers, so-called microcompression test. As an example determination of Al thin film properties deposited on Si substrate is introduced in the paper. Microcompression combines the sample preparation with the use of focused ion beam (FIB) with a compression test carried out using nanoindenter. Cylindrical specimens (pillars) were prepared in Al film using FIB. The typical diameter of pillars was about 1.3 μm and their height was about 2 μm. The results depend on crystallographic orientation of pillar. Stress-strain curves of the thin film were obtained. Experimentally measured data on pillars needs correction to obtain undistorted material properties of Al thin film. A necessary correction using finite element modeling is suggested in the paper. The paper contributes to a better characterization of very thin surface layers and determination of their mechanical properties.
Keywords: FEM modelling; focused ion beam; microcompression; thin film properties
Project no.: CEZ:AV0Z20410507 (CEP)
Host item entry: 14th International conference Applied Mechanics 2012 - Conference proceedings, ISBN 978-80-261-0097-3

Institution: Institute of Physics of Materials AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0216761

Permalink: http://www.nusl.cz/ntk/nusl-136103


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Research > Institutes ASCR > Institute of Physics of Materials
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