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Original title:
The smart electronic unit for precise measurement of refractive index of air in a nano-positioning stage for scanning probe microscopy (SPM)
Authors: Hucl, Václav ; Čížek, Martin ; Buchta, Zdeněk ; Mikel, Břetislav ; Lazar, Josef ; Číp, Ondřej
Document type: Papers
Conference/Event: NANOCON 2012. International Conference /4./, Brno (CZ), 2012-10-23 / 2012-10-25
Year: 2012
Language: eng
Abstract: When the traceable measurement of dimensions of samples in scanning probe microscopy is needed the position of the probe tip has to be monitored by a set of laser interferometers. The measurement is done very often during standard atmospheric conditions so the changes of the refractive index of air have an influence to measured values of the length with 1.0exp(-4) relatively. Thus the measurement of the refractive index of air and application of the instantaneous value of the index to all of measurement interferometric axes is necessary. In the work we developed new concept of electronic unit which is able to monitor the refractive index of air on basis of measurement of weather conditions: temperature, humidity and pressure of the air. The unit uses modified Edlen formula for calculation of the refractive index. The next step of the work is verification of accuracy of the measuring capability of the unit. We tested the accuracy with reference unit which measure the refractive index of air by a set of etalon sensors. The expected accuracy of the smart electronic unit falls to the 4.1exp(-7) relatively. The important advantage of the unit is very low power consumption of electronics so the unit causes very small temperature effects to the measuring process.
Keywords: laser interferometer; precise measurement; refractive index of air
Project no.: FR-TI2/705 (CEP), FR-TI1/241 (CEP), GAP102/10/1813 (CEP)
Funding provider: GA MPO, GA MPO, GA ČR
Host item entry: NANOCON 2012, 4th International Conference Proceedings, ISBN 978-80-87294-32-1
Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0215562
Permalink: http://www.nusl.cz/ntk/nusl-135490
The record appears in these collections:
Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers
Authors: Hucl, Václav ; Čížek, Martin ; Buchta, Zdeněk ; Mikel, Břetislav ; Lazar, Josef ; Číp, Ondřej
Document type: Papers
Conference/Event: NANOCON 2012. International Conference /4./, Brno (CZ), 2012-10-23 / 2012-10-25
Year: 2012
Language: eng
Abstract: When the traceable measurement of dimensions of samples in scanning probe microscopy is needed the position of the probe tip has to be monitored by a set of laser interferometers. The measurement is done very often during standard atmospheric conditions so the changes of the refractive index of air have an influence to measured values of the length with 1.0exp(-4) relatively. Thus the measurement of the refractive index of air and application of the instantaneous value of the index to all of measurement interferometric axes is necessary. In the work we developed new concept of electronic unit which is able to monitor the refractive index of air on basis of measurement of weather conditions: temperature, humidity and pressure of the air. The unit uses modified Edlen formula for calculation of the refractive index. The next step of the work is verification of accuracy of the measuring capability of the unit. We tested the accuracy with reference unit which measure the refractive index of air by a set of etalon sensors. The expected accuracy of the smart electronic unit falls to the 4.1exp(-7) relatively. The important advantage of the unit is very low power consumption of electronics so the unit causes very small temperature effects to the measuring process.
Keywords: laser interferometer; precise measurement; refractive index of air
Project no.: FR-TI2/705 (CEP), FR-TI1/241 (CEP), GAP102/10/1813 (CEP)
Funding provider: GA MPO, GA MPO, GA ČR
Host item entry: NANOCON 2012, 4th International Conference Proceedings, ISBN 978-80-87294-32-1
Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0215562
Permalink: http://www.nusl.cz/ntk/nusl-135490
The record appears in these collections:
Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers
Record created 2013-01-04, last modified 2021-11-24