Název: The smart electronic unit for precise measurement of refractive index of air in a nano-positioning stage for scanning probe microscopy (SPM)
Autoři: Hucl, Václav ; Čížek, Martin ; Buchta, Zdeněk ; Mikel, Břetislav ; Lazar, Josef ; Číp, Ondřej
Typ dokumentu: Příspěvky z konference
Konference/Akce: NANOCON 2012. International Conference /4./, Brno (CZ), 2012-10-23 / 2012-10-25
Rok: 2012
Jazyk: eng
Abstrakt: When the traceable measurement of dimensions of samples in scanning probe microscopy is needed the position of the probe tip has to be monitored by a set of laser interferometers. The measurement is done very often during standard atmospheric conditions so the changes of the refractive index of air have an influence to measured values of the length with 1.0exp(-4) relatively. Thus the measurement of the refractive index of air and application of the instantaneous value of the index to all of measurement interferometric axes is necessary. In the work we developed new concept of electronic unit which is able to monitor the refractive index of air on basis of measurement of weather conditions: temperature, humidity and pressure of the air. The unit uses modified Edlen formula for calculation of the refractive index. The next step of the work is verification of accuracy of the measuring capability of the unit. We tested the accuracy with reference unit which measure the refractive index of air by a set of etalon sensors. The expected accuracy of the smart electronic unit falls to the 4.1exp(-7) relatively. The important advantage of the unit is very low power consumption of electronics so the unit causes very small temperature effects to the measuring process.
Klíčová slova: laser interferometer; precise measurement; refractive index of air
Číslo projektu: FR-TI2/705 (CEP), FR-TI1/241 (CEP), GAP102/10/1813 (CEP)
Poskytovatel projektu: GA MPO, GA MPO, GA ČR
Zdrojový dokument: NANOCON 2012, 4th International Conference Proceedings, ISBN 978-80-87294-32-1

Instituce: Ústav přístrojové techniky AV ČR (web)
Informace o dostupnosti dokumentu: Dokument je dostupný v příslušném ústavu Akademie věd ČR.
Původní záznam: http://hdl.handle.net/11104/0215562

Trvalý odkaz NUŠL: http://www.nusl.cz/ntk/nusl-135490


Záznam je zařazen do těchto sbírek:
Věda a výzkum > AV ČR > Ústav přístrojové techniky
Konferenční materiály > Příspěvky z konference